ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector: CN5 Wiring diagram LEC6N(NPN) LEC6P(PNP) Power supply 24 VDC for I/O signal CN5 Power supply 24 VDC for I/O signal CN5 A1 A1 COM+ COM+ COM COM A2 A2 A3 A3 IN0 IN0 A4 A4 IN1 IN1 A5 A5 IN2 IN2 A6 A6 IN3 IN3 A7 A7 IN4 IN4 A8 A8 IN5 IN5 A9 A9 SETUP SETUP A10 A10 HOLD HOLD A11 A11 DRIVE DRIVE A12 A12 RESET RESET A13 A13 SVON SVON Load Load B1 B1 OUT0 OUT0 Load Load B2 B2

High-Precision Digital Pressure Switch

Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Rotary Clamp Cylinders

0.8 mA or less 3-wire NPN PNP IC circuit, Relay, PLC 5, 12, 24 VDC (4.5 to 28 V) 10 mA or less 28 VDC or less 40 mA or less 0.8 V or less at 10 mA (2 V or less at 40 mA) 100 A or less at 24 VDC Operating position .

Compact

27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

MXS Series Air Slide Table

GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5 100.5 150.5 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 82.5 132.5 68 68 Air Slide Table (Symmetric type

CRB2/CRBU2/CRB1

M1 M2 Body (B) N Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R CRB1 Y Y A1 M1 A2 P 6-Q X A1 (mm) R (RC) E2 (h9) F (h9) E1 (g6) V B W C Model A1 D G M2 X U A2 Y H N P J Z M1 S Q K T L CRB1BW 50CRB1BW 50-E CRB1BW 63CRB1BW 63-E CRB1BW 80CRB1BW 80-E CRB1BW 100CRB1BW 100-E 26 21 29 27 30 29 35.5 38 18 22 30 32 14 18 15 25 20 30 24 38 M6 x 1 depth 9 12 0.006 0.017 11.9 0 0.043 25 0

High performance type Step Motor Controller (Servo/24 VDC)

Parallel l/O Connector 28 6.1 Parallel I/O specifications 28 6.2 Parallel I/O type (NPN/ PNP type) 28 (1) Parallel I/O input circuit (same for both NPN and PNP type) 28 (2) Parallel I/O output circuit 28 6.3 The parallel I/O signal is detailed 29 6.4 Parallel I/O Wiring Example 36 7. Setting Data Entry 37 7.1 Step data 37 7.2 Basic parameter 40 7.3 Return to origin parameter 43 8.

Step Motor Controller (Servo / 24 VDC)

CN5: Parallel l/O Connector . 28 6.1 Parallel I/O specifications . 28 6.2 Parallel I/O type (NPN/ PNP type) . 28 (1) Parallel I/O input circuit (same for both NPN and PNP type) . 28 (2) Parallel I/O output circuit . 28 6.3 The parallel I/O signal is detailed . 29 6.4 Parallel I/O Wiring Example . 34 7.

Servo Motor Controller (24 VDC)

Setting Data Entry.28 7.1 Step data.28 7.2 Basic parameter.31 7.3 Return to origin parameter .33 8.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

1

Stopper ZZ d c a b Bore size (mm) Available for use stroke Bore size (mm) G ML MK MI MA MT MH L A B CA2 40 50 63 80 100 M14 x 1.5 181 46 22 32 12 16 20 25 32 40 50 63 80 100 14 19 7 25 11 5 24 3.5 (37.4) 57.7 (64.9) 30.2 5 to 30 206.5 58.5 28 42 14 19 7 28 11 5 24 3.5 (41) 58.5 (68.5) 31 M18 x 1.5 CS1 210 54 28 42 20 22.5 10 36 17 8 29 4.5 (46) 67.5 (79.5) 34 Stroke c + Stroke 257 70 35 55

Rotary Table/

to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

Vacuum

(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.

Vacuum

(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.

e

Nominal size Stroke Nominal size: 16 (74.7) (101.7) (60) (40) 80 27 70 74.7 (60) 27 44 72 Motor 5H7 depth 5 LJ1 LJ1 43.5 LG1 LG1 60 60 60 139 69 10.2 79 139 LTF LTF 87 66 80 LC1 LC1 10 7 4 LC7 LC7 28 28 2 x 2 x 9.5 counterbore depth 5.4 5.5 through hole Long hole depth 5 4 x M5 x 0.8 depth 9 T-slot section for mounting 5H7 LC8 LC8 5.6 (Max.

Clean Regulator/Fluororesin Type

B1 B2 Model SRF10S-1S07 SRF10S-1S0711 SRF10S-1S11 SRF10S-1S1107 SRF10S-2S07 SRF10S-2S0711 SRF10S-2S11 SRF10S-2S1107 31 48 31 48 OUT IN 28 51 54 26 28 51 28 51 31 48 28 52 28 52 27 55 5.5 27 55 A1 A2 27 55 28 52 B1 B2 Tube extensions 23 Pilot port Rc, NPT 1/8 R 12 32 54 26 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 5/32" OUT IN 1/4" 5.5 32 30 30 884 Clean Regulator/Fluororesin Type SRF