3M/SMseries

Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

I

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator

mark shows the dimensions of the solenoid valve VF3120K-1G1-02-X14. Drawing shows the auto switch mounted on the port side.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: A2 (URJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: C01 (Rc 1/8), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: URJ 1/4, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: TSJ 1/4, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: Rc 1/8, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]