21

Bore size Stroke Head Flange (G): ClM3G R0.5 Effective thread length 2 x FL 4 x FD Mounting hole H2 2 x P 2 x NN G G Width across flats B2 2 x FD Mounting hole Width across flats KA C2 D H1 Corner of the cover I Eh8 FY B MM AL A H Z + Stroke S + Stroke F 1.5 Width across flats B1 Width across flats lNA 20 to 32 FX FZ FT 40 ZZ + Stroke Head Flange (G) (mm) AL 14.5 A 12 B 34 B1 13 B2 26 C2

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B (10) One-touch tube fitting (10 in one set) Body type Port size 02 2 One-touch tube fitting Straight Metric size Elbow 04 4 One-touch tube fitting 01 1/8 One-touch tube fitting Inch size 03 5/32 One-touch tube fitting * For the combination of the elbow type body and the One-touch tube fitting 4, add the suffix -N to the part number.

3M/SMseries

Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

I

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator

mark shows the dimensions of the solenoid valve VF3120K-1G1-02-X14. Drawing shows the auto switch mounted on the port side.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Specifications Series PSE200A PSE533 PSE543 PSE563 PSE573 PSE530 PSE540 PSE560 PSE570 Applicable SMC pressure sensor PSE550 PSE531 PSE541 PSE561 PSE532 PSE564 PSE574 PSE575 PSE576 PSE577 Rated pressure range 0 to 2 kPa 0 to 101 kPa 100 to 100 kPa 0 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa Display/Set pressure range 0.2 to 2.1 kPa 10 to 105 kPa 105 to 105 kPa 10

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: A2 (URJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: C01 (Rc 1/8), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: URJ 1/4, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: Rc 1/8, Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]