3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

How to Order Rated pressure range ISE20B 0 to 1 MPa ISE20B M5 L M For positive pressure For vacuum/ compound pressure ZSE20B L M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 100 kPa ZSE20BF 100 to 100 kPa Symbol Description Symbol Description Nil Units selection function*1 M SI unit only*2 P Units selection function (Initial value psi)*1

VS 8-2/VS 8-4

kit with 0.6 m lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Rotary Table/

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m 6 k C n c l o ni a u 8 r Mi im 3 n 1 o ti e ax ta ng ro m M u ra m ni Mi 180 n tio e C s ta l i o w c k ro m mu xi Ma Positioning pin hole Positioning pin hole Position

C95

weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40

CRQ2

I = I + I kgm m, m: Mass of loads I and I kg r, r: Diameters of loads I and I m L: Distance from the rotational axis to load I center of gravity m Calculation example When m 2.5kg, m = 0.5kg, r = 0.1m, r = 0.02m, L = 0.08m I = 2.5 x = 1.25 x 102 0.1 kgm 2 0.02 I = 0.5 x + 0.5 x 0.08 = 0.33 x 10kgm I = (1.25 + 0.33) x 10= 1.58 x 10kgm 16 Technical Data/Moment of Inertia Specific Application

NCA1

Mounting Auto Switch Suffix Stroke Bore THREAD FORM CODE S P E C I A L R O D T H R E A D X A O P T I O N Thread Form Code M .

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

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A u s t i n , , Boston 'Charlotte : , Chicago :i,Cincinnati ::, cleveland : D a l l a s r Detroit , Indianapolis l\41 Los Angeles [V] Milwaukee Minneapolis lvlontreal ' N a s h v i l l e ' New Jersey ri Phoenix : Portland , Flichmond Fochester San Francisco St. Louis r' Tampa l, Toronto [M] 'r: Vancouver :,, Windsor (lndianapolls) SMC Corpordon olAme Da U.S.A.

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Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (This eliminates wide variations of the indicated value.) 5% R.D.

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

NCA1

NCA1-CB325 NCA1-CB800 NCA1-CB1000 MR 1 1/16 1 1/8 1 3/4 M 3/4 1 1 3/8 LR 1 1/16 1 1/4 1 7/8 FL 1 7/8 2 1/4 3 F 5/8 3/4 7/8 E 3 1/2 4 1/2 5 DD 1/2-20 5/8-18 5/8-18 CW 5/8 3/4 1 CD 3/4 1 1 3/8 CB 1.265 1.515 2.032 BA 2 9/16 3 1/4 3 13/16 AA 3.6 4.6 5.4 Weight (lbs) 2.79 5.45 9.89 Note: Pivot pin is not included. Rod Clevis CW CW CB ER CH F CD A L CE KK Tap through Dimensions Part No.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Refer to page 336 for the lead wire length of L and M plug connectors. Refer to page 337 for the connector assembly with cover for L and M plug connectors. Note) Enter the cable length symbols in .

Electric Actuator/Slider Type

[m] 2 2 5 5 A 10 B LE-CSM: Motor cable (13.7) SSCNET#optical cable (LECSS -S , LECSS2-T ) LE CSS (30) L 1 LE-CSB: Lock cable Motor type (11.8) (13) Cable length S AC servo motor L 0.15 m K 0.3 m J 0.5 m 1 1 m 3 3 m L (29.6) Cable description S SSCNET III optical cable LE-CSE: Encoder cable LE-CSSis MR-J3BUS M manufactured by Mitsubishi Electric Corporation. 18.8 (30) L 37.4 Regeneration

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 1.5 3 3 5 5 8 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) A 10 B 15 Actuator side Driver side C 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

CLA

PSI Volume Energy Volume aim 14.7 psi mm' 6.10xl0-5 in3 inl 16387 mm' ff Ib 1.356 N'm in3 16.387 em3 (cc) ff 'Ib 1.356 J em3 (ee) 0.0610 in3 Energy fI" 0.0283 m' kWh 3.6 MJ m' 35.320 fI' N'm 0.7375 fI ' Ib fI' 28.329 L L 0.0353 ff' J 0.7375 fI 'Ib gal(U.S.) 3.785 L Power L 0.2642 gal (U.S.)

SV

The graphs above indicate the total stroke time and speed at the end with respect to various load ratios and strokes for each cylinder bore size. 0.5 MPa Inlet pressure Total stroke time (t) SV1000: 1 m, SV2000/3000: 2 m, SV4000: 3 m Piping length Speed d% d% (1) Stroke (mm) Stroke (L) Speed at the end Vertical upward Cylinder direction Stroke Speed controller Meter-out, Directly connected

Possible to transfer a workpiece at low-speed.

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Refer to pages 837 and 838 for the details of solid state auto switch with pre-wired connector.