SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

I

body sizes only) G Gauge (not available on D body) N Silencer P I L O T 0 Internal 1 External (not on VYID00) Nil Rc(PT) T NPTF F G(PF) N NPT) B O D Y S I Z E P O R T S I Z E Mounting Type Symbol Symbol P,A port R port Cv Hysteris Sensitivity Repeatability Notes: 1.

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

IS1000

R 1/8 NPT 1/8 None With seal Lead wire length 3 m Regulating pressure range 0.1 to 0.6 MPa Nil S X202 Lead wire length 3 m Regulating pressure range 0.1 to 0.6 MPa X215 16-9-1 2 Series IS1000 Construction 5 500 50 20 t u 0.1 0.2 y 0.3 0.4 i 58.5 MPa q Component Parts !

1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?1% F.S. or lessMaximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?

1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?1% F.S. or lessMaximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?

1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)1 to 5V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 4 to 20 mA ?2.5% F.S.?1% F.S. or lessMaximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?1% F.S. or lessMaximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?