V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 ) 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 ) 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

PFM3.eng

To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. approx. 1 second The flow range is displayed 10 L/min (PFM510) 25 L/min (PFM525) 50 L/min (PFM550) 100 L/min (PFM511) Indicator LED (OUT2) Indicates the output status of OUT2. LED is ON (Red) when OUT2 is ON.

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

SMC Electronic Switch Series Variations

8 NPT 1/8 None With sealant 01 N01 S X201 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X202 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X215 3.12-1 Mechanical Style Pressure Switch IS1000 Construction 5 50 20 500 t PSE u ZSE4 ISE4 0.1 (1) 0.2 (2) y 0.3 (3) ZSE5 ISE5 0.4 (4) i MPa {kgf/cm2} 58.5 ZSE6 ISE6 q Components !

Precision Regulator

IRM 10 3 G ARJ A IR X465 0 AR425 to 935 Set pressure and quantity 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs.

NCX2 seies

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

IR1000/2000/3000

IRM 10 3 G Copper-free Specifications 2 Set pressure and quantity External and internal copper parts are changed to stainless steel or aluminum. 0.2MPa setting 1 to n pcs. 0.4MPa setting 1 to n pcs. 0.8MPa setting 1 to n pcs. 0 1 2 Standard part number 20 Note) Contact SMC if equipped with pressure gauge.

Air Cylinder NCX2 Series Slide Unit

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

25

Nut, 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Applicable tube size (inch) Size Symbol 2 1/4" x 5/32" A Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting.

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02