V100

VQ (21.5) (10.5) 21.5 2 2 VKF 3.9 P = 7.2 11 VQZ n-M3 x 0.5 2 (OUT) port VZ VS VFN Dimensions Formulas: L1 = n x 7.2 + 8.8, L2 = n x 7.2 + 14.8, n: Stations (maximum 20 stations) n L 12 95.2 101.2 19 145.6 151.6 2 23.2 29.2 3 30.4 36.4 4 37.6 43.6 5 44.8 50.8 6 52 58 7 59.2 65.2 8 66.4 72.4 9 73.6 79.6 10 80.8 86.8 11 88 94 13 102.4 108.4 14 109.6 115.6 15 116.8 122.8 16 124 130 17 131.2

VQC

M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481 567 14

Fieldbus System

M4 mounting hole Connector for Handheld Terminal End Plate n 8 7 6 5 4 3 2 D side U side Station 1 3/4: 3/4" female thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (

Series VQ Metal Seal/Rubber Seal Body Ported

How to Order Manifold 1 4 08 N VV5Q C Option Series None 0 1 2 VQ0 VQ1000 VQ2000 D N S DIN rail mounting With name plate Built-in silencer (Direct exhaust) Manifold Note 1) When specifying more than one option, please list alphabetically.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

FG + + 0V 24V SMC S E R I A L U N I T MODEL SC 120 80 10.6 4 46.2 1 ERR T/R RUN MODEL SB RD SD 0 EX123: 2 x G1/2 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assy (AXT100-B04A) on the unused conduit port (G1/2). L8 = 16n + 118.5 100 Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

FG + + 0V 24V SMC S E R I A L U N I T MODEL SC 120 80 10.6 4 46.2 1 ERR T/R RUN MODEL SB RD SD 0 EX123: 2 x G1/2 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assy (AXT100-B04A) on the unused conduit port (G1/2). L8 = 16n + 118.5 100 Drawing shows a SC case.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Scale: 40% (5.5) (35) Grommet (G) (11) 27 24.5 Mounting holes n-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings for 1/4" M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations 6.5 D side 2.3 2-M5 x 0.8 External pilot port 21.6 (Only external pilot port

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2

Digital Flow Switch (Integrated display type)

8040 0x1F68 Accumulated measured value (index) Reply the accumulated measured value corresponding to the product range and unit selection. 2 R S16 N -2 to 5 -82No.PF-OMW0007-E 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

Fieldbus System

2 B 2 B 2 B 2 B 2 55.5 69 3 1 54 12 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 22 17 19 34 69.5 1/2" 1(P) port 34.5 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Formula: L1 = 41n + 77 L2 = 41n + 175 * L2 dimension: Without I/O unit For additional I/O unit, add 47 mm. * n2: I/O unit stations Dimensions n: Stations (Maximum 12 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 118 159 200 241 282

SYJ300/500/700

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 48 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8,

5 Port Solenoid Valve, Series VQC

M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 (mm) Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

0.

A 2 A 2 A 2 A 2 A (8) 1/8 [1(P), 3(R) port] 8 2 x 4.3 (For mounting) L5 6.5 One-touch fitting [2(A) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" 15 M5 x 0.8 [2(A) port] L4 L3 39.5 (Station 1) (Station n) C6: 44.1 N7: 47.9 (3.2) (For M5) 45.2 A A 20 (11) (7.5) 2 2 The dashed lines indicate the DIN rail mounting [-D].

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8, 63.5

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting 65.2 [67.4] Approx. 300 (Lead

PFxx-OMJ0005CN

01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

P PF2M701/702/705/710 -C4(-L) 59.1 2.8 depth 8.4 8 PF2M701/702/705/710/ 725/750-C6(-L) 59.9 2.8 depth 8.4 8 2 x P PF2M725/750-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(-L) 68 2.8 depth 6.2 PF2M711/721-N7(-L) 64.6 2.8 depth 6.2 2 x P PF2M7mL-C4/C6/C8/N7(-L) 48 A 48 A 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 C (30.9) 38.5 C (30.9) 3 3 18 OUT IN 18 68 2 x 3.4 2

7ND9071en

I32 Omron E2E-X2Y1, 2-wire type; AC; <100 mA; 24240 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Applicable to 6. sign "N", "N7", "E1", "E2", "E5" and "E7". P+F, NJ4-12GK-SN, 2-wire, DC; > 3 mA; < 1 mA, NAMUR NC Temperature range -50 ... +85 C /-58 ... 185 F) Applicable to 6. sign "N", "N7", "X", "X7", "U", "E1", "E2" or "E7". Note that device may limit temperature range.

Intrinsically Safe Valve

2009)(Refer to page 40 for details) How to Order 5 2 LL SY 53 40 Thread type UL/CSA compliant Nil F N T Rc G Series NPT NPTF 5 7 9 53-SY5000 Port size 53-SY7000 Symbol Port size Applicable series 53-SY9000 Nil Without sub-plate Type of actuation 02 53-SY5000 53-SY7000 53-SY7000 53-SY9000 03 1/4 With sub-plate 2-position single (A) 4 2 (B) 3/8 With sub-plate 1 1/2 With sub-plate 04 53-SY9000