Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(A) (A) (A) 2 (A) 2 2 2 1 (P) 3 (R) 1 (P) 3 (R) h h 1 (P) 3 (R) 1 (P) 3 (R) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note Zinc die-casted No.

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

ARM10/11

R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

ARM10/11

R 1 04 A Z Common supply type 1 2 3 4 5 6 1.

SJ3A6

2 !3 i !1 !0 2(B) Symbol: F2 Vacuum pressure side filter o !5 !4 1(P) 3/5(E) Description No. Material Note Component Parts If there are situations such as filter clogging, a drop in suction force, or slow response time, stop operation and replace the filter. 1. Using a precision driver, remove the filter assembly (!2 or !4) from the main unit. 2.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

5 Port Solenoid Valve Series VQZ1000/2000/3000

1(P), 5(R1), 3(R2) port] + + M5 x 0.8 [4(A), 2(B) port] 9 7 SJ (5.5) (8) 44.5 140 [144.4] 31.5 (30) SY 17.3 30 127 [131.4] P 1 3 5 R2 R1 1 P 3 5 R2 R1 12 21 21 B B B B B B B 20.5 (35) 60 2 2 2 2 2 2 2 4 4 4 4 4 4 4 SV A A A A A A A 31.5 63.5 [65.7] (DIN rail) SYJ 4 x 4.5 (For mounting) 34.5 SZ 12 10 8 6 4 2 0 + + + + + + + M3 x 0.5 (External pilot port) (DIN rail clamp

Compact manifold regulator ARM5 Series

SRP Note) A pressure gauge with a full span of 0.8 MPa is attached. SRF Symbol Relieving type Non-relieving type ITV IN IN 1 1 IC OUT OUT 2 2 ITVH OUT OUT 2 2 ITVX Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side.

Digital Flow Switch (Integrated display type)

Circuit (Class 2) of maximum 30 Vrms (42.4 V peak) or less, with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer. The product is a UL approved product only if it has a mark on the body. Use the specified voltage. Otherwise failure or malfunction can result. Insufficient supply voltage may not drive a load due to a voltage drop inside the product.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

PFxx-OMJ0005CN

PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

tubing O.D.: 6 24 13.3 16.2 34 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 X P 1 A 4 One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 24 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 A A 4 A 4 A 4 A 4 A 4 P 1 One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 M5 x 0.8 [4(A), 2(B) port] (L4) L3 SI unit (3.2) 101.2 8 3.1 18 28.8 36.3 58.2 3.5 5.5 35

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Digital Flow Switch (Integrated display type)

Circuit (Class 2) of maximum 30 Vrms (42.4 V peak) or less, with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer. The product is a UL approved product only if it has a mark on the body. Use the specified voltage. Otherwise failure or malfunction can result. Insufficient supply voltage may not drive a load due to a voltage drop inside the product.

Flow Sensor Series PFMV

Mounting screw (M3 x 8 l) Power supply / Output connector (2 m) ZS-28-A Bracket ZS-28-B With M3 x 5 l (2 pcs.) Panel mount adapter Sensor connector ZS-28-C 1 pc. Note) Options are shipped together, but not assembled. Panel mount adapter ZS-27-C With M3 x 8 l (2 pcs.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

single 1 4 Power saving circuit is not available for D, DO, Y, YO or W types. 10-SY9000 (A)4 2(B) 3 8 1 F2: With side bracket One-touch fitting (Metric size) 1 (P) (EA)5 3(EB) Symbol Port size Applicable series For DC 2 position double 4 One-touch fitting C4 10-SY3000 2(B) (A)4 5 24 VDC 6 12 VDC 6 One-touch fitting C6 2 4 One-touch fitting C4 (EA)5 1 (P) 3(EB) V 6 VDC 6 One-touch fitting