2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Suction Verification High Vacuum Set-value correction by auto-shift function Suction Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value P-1 Rectified value P-1 (Differential) Pressure H-1 (P-3) H-1 (H-2) n-1 Min.

PSxx-OMU0008CN

10 1 2466 LCD * -8No.PS-OMU0008CN-D ISE20C X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E

PSxx-OMM0002CN

6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa

Digital Flow Monitor

Description 1 DC(+) 2 N.C. 3 DC(-) 4 IN : 1 to 5 V or 4 to 20 mA Sensor connector (Part No: ZS-28-CA-4) PIN No. Description 1 DC(+) 2 N.C. 3 DC(-) 4 IN : 1 to 5 V or 4 to 20 mA -83No.PF-OMU0007-D Panel cut-out dimensions Mounting individually More than 2 pcs. (n pcs.) Close mounting -84No.PF-OMU0007-D Revision history A: Contents are added.

Flow Sensor Series PFMV

[l/min] 954 Flow Sensor Series PFMV5 Dimensions PFMV5-1 PFMV5F-1 0.8 34.4 10 2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through

Multi-channel Digital Sensor Monitor

Remarks Power supply/output cable ZS-26-L Length 2 m Connector for sensor lead wire ZS-28-C 1 pc.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R ZS-33-F S Stations ZS-33-D S 1 2 3 4 5 ZS-33-D 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

Digital Pressure Switch ( compatible)

Number of pressurizing errors 0X07D4 (2004) 0 R N U16 0 0 ~ 1000 1: "R" means Read and "W" means Write. 2: "Y" indicates that the parameter setting data is saved to the master, and "N" indicates that the parameter is not saved. 3: Refer to the table below for the symbol.

Digital Pressure Switch

Remarks Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 One-touch fitting

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

EXxx-OMZ0016

) 1 +COM(US2_24V) 2 n+1 2 n+1 3 -COM(US2_0V) 3 +COM(US2_24V) 4 n 4 n * -COM is connected to 0V (US2) and +COM to 24V (US2) inside the product as shown in the circuit diagram below.

Digital Flow Switch (Integrated display type)

Vinyl chloride piping tube (30 A) ZS-40-U30 30 A Vinyl chloride piping tube 1 pc. 25 A Holding plate ZS-40-U25-A 1 pc., With two hexagon socket head cap screws of M5 x 80. 30 A Holding plate ZS-40-U30-A 1 pc., With two hexagon socket head cap screws of M5 x 65. : Accuracy may vary by 1 to 2%, if vinyl chloride piping tube is replaced. -13No.PF-OMM0005-N Summary of Product parts Body 1 DC(

Digital Pressure Switch

Connector pin numbers -18No.PS-OMX1005 Internal circuit and wiring examples ZSE20AF---Output specification -N NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 1 V or less -B PNP open collector 2 outputs Max. 80 mA Residual voltage

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

Digital Pressure Switch

for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit for copy function ZS-38-U for copy function

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Digital Pressure Switch

Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit

PSE530/200

ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.

Digital Flow Switch ( compatible)

flow value 2 R Accumulated index F32 N 0 to 6 8040 5 0x1F68 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.