Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: 01 (Rc1/8), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 9.3 8.4 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10.6 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q1 N1 ZA1 1 1 Q1 N1 ZA1 1 2 Q1 N1 ZA1 1 4 Q1 N1 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7 Air pressure supply
x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556
B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2
Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 40.1 39.3 18.8 18 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] 2-One-touch fitting One-touch fitting 2n1-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 [PE:
: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2
(Station 1) For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R 18 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 39.3 40.1 63.3 79.8 1 P 1 P 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 2-One-touch fitting [1 (P), 3/5 (R) port] [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 + + + + 2n1-One-touch fitting One-touch fitting One-touch fitting
Note 2) For one-touch fittings for P/R port and silencer part no., refer to page 978. 5 1 15 VQ5 3 P 4 1/8 [1(P) port] G1/16 [5(R1), 3(R2) port] VQC VQZ VQZ2 2 (R)-G1-M5 1 8 9 M-type plug connector (M): VQZ2 2 (R)-M1-C4, C6 0 1 1 8 9 0 1 SQ Approx. 300 (Lead wire length) VFS 83.7 [85.9] M5 x 0.8 4(A), 2(B) port 78.7 VFR 12 VQ7 25 40.1 [47.1] Unless otherwise indicated, dimensions are the
Y 0: 2_P (Normal output) 1: 2_n (Reverse output) 1540 0x0604 0 R/W Dir (Setting of the accumulated flow direction) 0: Add 1: dEC1 2: dEC2 Addition/Subtraction U8 0 Y 1600 0x0640 0 R/W 0: 1.0 sec 1: 2.0 sec 2: 5.0 sec 1 R/W FiL_FLoW (Digital filter_flow rate) U8 0 Y Set digital filter 1800 0x0708 2 R/W FiL_PrES (Digital filter_pressure) U16 10 Y 0 to 3000 ms 10 ms increments (0 to 30 sec.)
Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.
(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.
Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP X 1 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)
D LED R R NL (Built-in terminal) Marking AC, 12 VDC or less for DC For 24 V or more 1 2 + 1 2 1 2 NL: Neon bulb R: Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 1418 A
N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.
side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve
1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !
1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !
Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High