ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

switch Reed switch 12 V Relay, PLC Grommet 24 V Yes 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit IC circuit 3-wire A96 A96V (NPN equivalent) 5 V 12 V Yes Relay, PLC 24 V Grommet A93 A90 A93V A90V 100 V 2-wire No 100 V or less Solid state auto switches marked with are produced upon receipt of order.

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt

Flow ranges (lpm): 10-100; Port sizes: 25A (32mm O.D.) ; Temperature rating: 0-70°C; Output options: NPN/PNP, (switch); 1-5V, 4-20mA; Accuracy: ±3% F.S.; Repeatability: ±2% F.S.

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

smcmaintenancepartslist

2, !3 and !4 each !2 !3 !4 Gasket (for plug) PVC MXP6-PS 6 O-ring NBR Piston seal Replacement Parts: Grease Pack Applied unit Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit MXPJ6 !3 !1 !2 The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series MXP. Seal Kit List Description Material Note No.

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

LEC-OM071xx

WDC error) Gr.2 A.EB1 Safety Function Signal Input Timing Error Gr.1 A.ED1 Command Execution Timeout Gr.2 A.F10 Main Circuit Cable Open Phase Gr.2 FL-1*2 System Alarm FL-2*2 CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error 2 A.

LEC-OM069xx

Option Module Detection Failure Gr.1 A.E74 Unsupported Safety Option Module Gr.1 A.E75 Unsupported Feedback Option Module Gr.1 A.EA2 DRV Alarm 2 (DRIVER WDC error) Gr.2 A.EB1 Safety Function Signal Input Timing Error Gr.1 A.ED1 Command Execution Timeout Gr.2 A.F10 Main Circuit Cable Open Phase Gr.2 FL-1*2 System Alarm FL-2*2 CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator

AC Servo Motor Driver (MECHATROLINK-III type)

Error 1 Gr.1 A.E40 MECHA TROLINK Transmission Cycle Setting Error Gr.2 A.E41 MECHATROLINK Communications Data Size Setting Error Gr.2 A.E42 MECHATROLINK Station Address Setting Error Gr.2 A.E50 MECHATROLINK Synchronization Error Gr.2 A.E51 MECHATROLINK Synchronization Failed Gr.2 A.E60 MECHATROLINK Communications Error (Reception error) Gr.2 A.E61 MECHATROLINK Transmission Cycle Error (

AC Servo Motor Driver (MECHATROLINK-II type)

Failure Gr.1 A.E74 Unsupported Safety Option Module Gr.1 A.E75 Unsupported Feedback Option Module Gr.1 A.EA2 DRV Alarm 2 (DRIVER WDC error) Gr.2 A.EB1 Safety Function Signal Input Timing Error Gr.1 A.ED1 Command Execution Timeout Gr.2 A.F10 Main Circuit Cable Open Phase Gr.2 FL-1*2 System Alarm FL-2*2 CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error