Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate:

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: Calibration Certificate,

100

1 o !0 t y i !2 !3 !

Process Pump

2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Silencer Series AN

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

ZL3-OM00801

3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2),

ZL3-OM00601

F04 2xG1/2*1 B2 Supply valve (N.O.) N06 NPT3/4 5/16(inch) 6) Rated voltage N04 2xNPT1/2 5 DC24V *1: The thread shape complies with the G thread standard (JIS B 0202).

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

, Made to Order: X109 (EPDM Seal Material)

None, Made to Order: X109 (EPDM Seal Material)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate: A

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket), Calibration Certificate: None, Made to Order: X109 (EPDM Seal

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal