Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Plate Cylinder with Lock Series MLU

LB LB LDH10 LDH10 LU LU L L Z + Stroke Z + Stroke RR RR ZZ + Stroke ZZ + Stroke (mm) (mm) LC 18 22 26 32 Applicable pin no.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 28 28 40 40 60 60 U CX L CZ Z + Stroke RR ZZ + Stroke Center trunnion/(T) Z+1/2 Stroke Center trunnion Port Cushion valve (mm) Bore size (mm) Stroke range TX TZ Z TT TDe8

Cylinder with Lock Series MNB

Z (Ex.)

ITV

x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

A02 A03 A04 A06 A10 B02 B03 B04 B06 Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/4 Side-ported 3/8 (A) 4 (B) 2 Rated coil voltage Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Nil A 4 (A) 4 (B) 2 S With surge voltage suppressor A 2 With light/Surge voltage suppressor B SOL.b SOL.a Z 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.O./N.O. (A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (length 300mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 2 (Out 1 Flow Rate: Analog 4 to 20 mA; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: Calibration Certificate, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: Calibration Certificate, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: Calibration Certificate, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

•

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