ZP

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

V

ASV410F-02 PT1/4 13.5 14 ASV410F-03 PT3/8 13.5 14 ASV510F-02 PT1/4 23 27 ASV510F-03 PT3/8 27 29 ASV510F-04 PT1/2 27 29 Model Applicable T H D1 D2 L1 L2 L3 L4 *A M1 Weight g H O W T O O R D E R S E R I E S (N)ASV Tube OD Max Min Max Min ASV120F-M3-04 4 M3x0.5 5.5 9.5 7 21.5 25 9.8 28.6 26.1 25.8 23.3 13 5 ASV220F-M5-04 4 M5x0.8 8 9.5 9.6 22.8 27.6 11.1 31.4 28.6 27.7 24.9 13 8 ASV220F-M5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 D3 L4 Max. Min. Max. Min.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

M1 D3 L4 Max. Min. Max. Min.

Table of Contents

-2-14 15 F.R.L.

Best Pneumatics Vol. 14

-2-14 15 F.R.L.

CQ2

2 38 33.5 48 8 5 5 to 50 55 26 14.5 6.6 4 20 24 14 3.2 48 42 62 9.2 5.8 CQS 5 to 50 59 29 15 6.6 4 25 26 14 3.2 52 46 66 10.7 5.8 CQ2 MU Flange/CQ2WL Rod end male thread (mm) Bore size (mm) A1 L3 L4 Rod end male thread 63.2 67 73 84 24 25.5 28.5 32.5 14 15.5 18.5 22.5 12 16 20 25 Flange (mm) A B FD FT FV FX Bore (mm) Stroke range(mm) FZ L1 L2 Foot Add foot bracket #2 to standard type SCQ2

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

118.5 14.5 173 162.5 139.5 16.5 198 187.5 171 13.5 223 212.5 192 15.5 Stations L1 L2 L3 L4 11 235.5 225 202.5 16.5 13 14 15 16 12 248 237.5 213 17.5 260.5 250 234 13 285.5 275 255 15 273 262.5 244.5 14 248 237.5 223.5 12 48 Series SY3000/5000 SY5000: Flat Cable Type/Plug-in Stations SS5Y5-45GUDC4 C6 C8 Note) L1 to L4 dimensions of SS5Y5-45GUStations Uare the same as SS5Y5-45GUStations D

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

185.5 175 150 17.5 185.5 175 198 210.5 200 223 L1 L2 L3 L4 137.5 162.5 187.5 171 13.5 212.5 192 15.5 118.5 14.5 139.5 16.5 160.5 12.5 181.5 14.5 Stations 11 13 14 15 16 12 235.5 225 248 260.5 250 234 285.5 275 255 248 273 L1 L2 L3 L4 237.5 213 17.5 237.5 262.5 223.5 244.5 202.5 16.5 13 15 12 14 37 5 Port Solenoid Valve Series SX3000/5000 Stations SS5X3-45GDC4 C6 Note) L1 to L4 dimensions

Rotary Actuator/Vane Type

X = E4 = E2 = DApplicable shaft type: W Applicable shaft type: W [mm] Size CRB2, CRBU2 Y L2 L4 max 10 3 to 8 5-(8-Y) to (Y-1) Y-1 15 3 to 9 6-(2-Y) to (Y-1.5) Y-1.5 20 3 to 10 7-(10-Y) to (Y-1.5) Y-1.5 30 5 to 13 8-(13-Y) to (Y-2) Y-2 40 7 to 15 9-(15-Y) to (Y-4.5) Y-4.5 [mm] Size CRB2 CRBU2 X L1 L3 max X L1 L3 max 10 5 to 14 9-(14-X) to (X-3) X-3 3 to 14 9-(14-X) to (X-1) X-1 15 8 to 18

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VS7 VVQZ2000-10A-5 C6: One-touch fitting for 6 1.12-47 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 VV5QZ15 C Station Port size 36 (11) (35) Grommet (G) 44.5 Mounting holes (7.5) 28.5 (5.5) 14 6.5 2n-C3, C4, C6 (4.5) DIN rail clamp screw C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side n A 4 B 2 Manual override 5 P=10.5 16.1 4 P=10.5 (L4)

Series VQ Metal Seal/Rubber Seal Body Ported

175 185.5 5 77.5 88 162.5 173 4 67 77.5 150 160.5 3 56.5 67 150 160.5 2 46 56.5 137.5 148 VQ4 25 35.5 112.5 123 L1 L2 L3 L4 VQZ Dimensions/Top entry connector [FU] (mm) VQD n L 1 100 110.5 16 15 250 260.5 14 237.5 248 13 237.5 248 12 225 235.5 11 212.5 223 10 200 210.5 9 187.5 198 8 175 185.5 7 162.5 173 6 162.5 173 5 150 160.5 4 137.5 148 3 125 135.5 2 112.5 123 L3 L4 100 110.5 VZS How

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASD230FM (4, 6, 1/8", 5/32", 1/4"), ASD330FM (6) are POM. 15-9-69 14 Series ASD-FM Dimensions: Metric Size ASD230FM ASD330FM/430FM Applicable tubing O.D. d Applicable tubing O.D. d L2 L3 M1 L2 L3 M1 D2 D2 L1 L1 L4 L4 H H (Hexagon width across flats) (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M1 Max. Min. Max. Max. Min. Min.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Modular F.R.L. Unit

New Old Model Reduction (mm) Old New AC1000 AC10 4 Improved visibility for lubricant drip with graduation for lubricant control AC2000 AC20 14 AC2500 AC25 14 AC3000 AC30 14 Graduation AC4000 AC40 18 AC4000-06 AC40-06 18 AC5000 AC50 18 AC5500 AC55 18 5 6 4 7 3 SMC Spacer with bracket 8 2 AC6000 AC60 18 9 1 Embedded pressure gauge is a standard feature.

Modular F.R.L. Unit

New Old Model Reduction (mm) New Old AC10 AC1000 4 Improved visibility for lubricant drip with graduation for lubricant control AC20 AC2000 14 AC25 AC2500 14 AC30 AC3000 14 Graduation AC40 AC4000 18 AC40-06 AC4000-06 18 AC50 AC5000 18 AC55 AC5500 18 5 4 6 3 SMC 7 2 8 Spacer with bracket AC60 AC6000 18 1 9 Embedded pressure gauge is a standard feature.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40

Modular F.R.L. Unit

New Old Model Reduction (mm) Old New AC1000 AC10 4 Improved visibility for lubricant drip with graduation for lubricant control AC2000 AC20 14 AC2500 AC25 14 AC3000 AC30 14 Graduation AC4000 AC40 18 AC4000-06 AC40-06 18 AC5000 AC50 18 AC5500 AC55 18 5 4 6 7 3 SMC 8 2 Spacer with bracket AC6000 AC60 18 9 1 Embedded pressure gauge is a standard feature.