AMX-OM-L025_e

Act i vat ed carbon f i ber el em ent el i m i nat es odour f rom com pressed ai r. Fi l t rat i on rat i ng0. 01 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et cl eanl i ness: 100 or l ess / f t 3 of 0. 3 m or m ore of part i cl e ( 35 or l ess / 10L ( AN R) ) To get t he best perf orm ance f rom your purchase, be sure t o read t hi s m anual caref ul l y bef ore use.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLA Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of the Greene, Tweed Technologies,inc. ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0009-E 3. Specifications 3-1.

High Vacuum L Type Valve

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.

AMX-OM-L022_e

W ARN I N G /H I N TS O N CO RRECT U SE Vi brat i on, Ai r onl y ! I m pact Envi ronm ent H i gher t han /M ERI TS 60

AMX-OM-L021_e

W ARN I N G Separat e and rem ove f orei gn m at eri al and oi l m i st cont ai ned i n com pressed ai r. Fi l t rat i on rat i ng0. 3 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et oi l m i st concent rat i on: 0. 8 ppm ( Fi l t er i nl et : 24ppm ) M I ST SEPARATO R Seri es AM Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent *N .

AMX-OM-L023_e

/M AI N TEN AN CE I N TERN AL PREFI LTER TYPE M I CRO M I ST SEPARATO R Seri es AM H Keep f ol l ow i ng t o operat e I nt ernal pref i l t er t ype m i cro m i st separat or properl y. Separat e and rem ove f orei gn m at eri al and aerosol oi l part i cl e cont ai ned i n com pressed ai r.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

AMX-OM-L020_e

/M AI N TEN AN CE At t ach t o t he m ai n pi pi ng t o rem ove cont am i nant s of oi l , w at er, f orei gn m at eri al i n com pressed ai r. Fi l t rat i on rat i ng3 m ( Fi l t rat i on ef f i ci ency99% ) Fl ui d ot her t han com pressed ai r Ai r pressure m ore t han 1. 0 M Pa** and 0. 05M Pa* or l ess Fol l ow i ng envi ronm ent s l ead to cause breakage.

Digital Flow Switch

All models 8 [ oU2] OUT2 Output mode 9 [ 2ot] OUT2 Switch operation Models with NPN2 output, PNP2 output 10 [ ] OUT2 Set value 11 [ ] OUT2 Hysteresis 12 [ r ES] Response time All models 13 [ SUb] Sub display All models 14 [ inP] External input Model with external input function 15 [ Fr E] Setting of analogue output Model with analogue output function 16 [SAvE] Accumulated value hold All

PFxx-OMU0002

ES: Analogue output: Select 1 to 5 V or 0 to 10 V Output impedance: 1 k FS: Analogue output 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 PNP (1 output) + External input type PF3A7H--ES/FSMaximum load current: 80 mA Internal voltage drop 2 V max. External input: Input voltage of 0.4 V max.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(For M8: 0.05 Nm, For M12: 0.1 Nm) EX9-AW ES 11 14 Connector type ES M8 connector (For socket), 10 pcs.

Cylinder with Lock

Taper ring Steel ball P f R R High locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

Information

R A-phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B-phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z-phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON Note 4) CN6 RES 19 Reset 3 MO1 PC 17

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

Plate Dimension is the same as the standard Mounting surface 2x2xJ Maximum screw-in depth;R Table 14Details of thread Bore size (mm) (Thread size) (Maximum screw-in depth) Dimension is the same as the standard Fig. 13 X2423 26/28 9.