M-E05-1-LQ1

LQ1-3B11 LQ1T4A-TT1 4 4-13 LQ1-4N13 LQ1-4B13 Tubing extensions 1/2" x 3/8" 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-TT2 4 Tubing extensions 1/2" x 3/8" 4-13 LQ1-4N13 LQ1-4B13 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-TT3 4 4-13 LQ1-4N13 LQ1-4B13 Tubing extensions 1/2" x 3/8" LQ1T4A-TT4 4 Tubing extensions 1/2" x 3/8" 4-13 LQ1-4N13 LQ1-4B13 LQ1T5A-TT1 5 5-19 LQ1-5N19 LQ1-5B19 Tubing extensions 3/4" x 5/8" 5-19

AC Servo Motor Driver (CC-Link Type ）

CN2 1) 13 5 13.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Port size M5 1/8 1/4 SY3000 SY3000-39-2A-Q SY5000 SY5000-39-2A-Q SY7000 SY7000-39-2A-Q SY3000 SY3000-38-2A-Q SY5000 SY5000-38-2A-Q SY7000 SY7000-38-2A-Q M5 1/8 1/4 Series Round head combination screw Gasket 1/4 SY9000 SY9000-39-2A-Q 1/4 SY9000 SY9000-38-2A-Q SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) SY3000-11-25 SY5000 SY5000-11-13 Note 1) The SUP port can be on the lead wire

Air Cylinder Series MB

32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 1/8 1/8 1/4 1/4 1/4 1/4 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 13 14 15.5 16.5 19 19 104 120.5

AC Servo Motor Driver (CC-Link Type ）

CN2 1) 13 5 13.

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

ZX

VJ100M1.7 x 15 VJ300M1.7 x 22 Note) In the case of ZX1VJ114, M, MN and MO cannot be used. 13-2-7 7 Series ZX Ejector Unit Specifications 1 2 ZX1-W07 1 2 ZX1-W10 1 2 Unit no. ZX1-W05 0.5 5 13 Nozzle dia.

Vacuum Pad

ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-Y2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-Y2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-Y2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

CQ2

14 14 17 34 40 50 5.5 5.5 6.6 Rc (PT) 1/8 Rc (PT) 1/8 Rc (PT) 1/4 8 8 10 55.5 62 77 30 30 39 16 16 20 13 13 15 12 12 11 Depth 8 Refer to p.2.3-18 for rod end nut and option bracket.

13

Filter: ZFA P. 13-10-1 ZP Air Suction Filter with One-touch Fittings: ZFB P. 13-10-4 ZCU Air Suction Filter In-line Type with One-touch Fittings: ZFC P. 13-10-7 AMJ Misc.

SMC

6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22-MXS16L-20 13-/22-MXS16L-30 13-/22-MXS16L-40 13-/22-MXS16L-50 13-/22-MXS16L-75 13-/22-MXS16L-100 13-/22-MXS16L-125 145 MXS Air slide table 1322Dimensions / MXS20 1322Basic style 2-M6 x 1 thread depth 6.5 Operating port 2-Rc, G, NPT1/8 13 3 J 12 Maximum 14.5 (With stroke

ZR

(1) on page 13-3-5 for details.

0.4

VQ 2 x Rc 3/4 1 2 3 4 5 6 7 8 n Stations D-side U-side VQ4 3(R) port 2 x Rc 1/2 4 x G 1/2 1(P) port VQ5 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 13 VQZ 55.5 42.7 43.5 20.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A SQ 33.5 12 11.5 15.7 2 x Rc 1/8 Pilot EXH port (6.5) 21.5 2 x Rc 1/8 VFS External pilot port 27 31 2n x Rc 1/4, 3/8, C8, C10, C12 Rc 1/

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

Table of Contents

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None

CV/MVGQ

16 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Bore size (mm) Without rod boot With rod boot l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke N S W X Y MM H 51 58 58 71 72 ZZ 221 231 239 271 283 e 43 52 52 65 65 ZZ 229 239 247 280 292 h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 40 50 63 80 100 27 30 31 37 40 13 13 16 16 17 84 90 98 116

CV/MVGQ

16 Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke N S W X Y MM e 43 52 52 65 65 H 51 58 58 71 72 ZZ 221 231 239 271 283 ZZ 229 239 247 280 292 f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 27 30 31 37 40 13 13 16 16 17 84 90 98 116 126 8 0 0 0 0 27 27 34 44 43 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 The minimum

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

16 45 17 M8 x 1.25 60 10.5 14 5.5 9 depth 7 Rc 1/8 8 55.5 7 34 30 40 13 16 52 17 M8 x 1.25 69 10 14 7 40 5.5 9 depth 7 Rc 1/8 8 62 30 50 15 20 64 22 M10 x 1.5 86 13 17 8 6.6 11 depth 8 Rc 1/4 10 77 39 50 63 15 20 77 22 M10 x 1.5 103 13 17 8 60 9 14 depth 10.5 Rc 1/4 10 90 39 80 21 25 98 26 M16 x 2.0 132 16 22 11 17.5 depth 13.5 Rc 3/8 12.5 114 10 77 48 100 27 30 117 26 M20 x 2.5 156 17.5