ZP

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/

CA2

Bore size (mm) K KA M MM N S H ZZ d e f h ZZ l C76 40 50 63 80 100 84 15 6 14 11 M14 x 1.5 27 1/4 51 146 52 43 59 1/4 stroke 154 90 15 7 18 11 M18 x 1.5 30 3/8 58 159 58 52 66 1/4 stroke 167 C85 98 17.5 7 18 14 M18 x 1.5 31 3/8 58 170 58 52 66 1/4 stroke 178 116 21.5 10 22 17 M22 x 1.5 37 1/2 71 204 80 65 80 1/4 stroke 213 C95 126 21.5 10 26 17 M26 x 1.5 40 1/2 72 215 80 65 81 224 1/4 stroke

Table of Contents

Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Swivels

Port 1 Port 2 Port 2 C PS2490202-20-20 5.91" 4.63" 3.43" 1.27" 2.63" 3.36" 1 1/4-11 1/2 1 1/4-11 1/2 150.2 mm 117.5 mm 87.0 mm 32.3 mm 66.7 mm 85.2 mm NPTF NPTF Port 1 PS2490202-24-24 5.91" 4.63" 3.43" 1.27" 2.63" 3.36" 1 1/2-11 1/2 1 1/2-11 1/2 150.2 mm 117.5 mm 87.0 mm 32.3 mm 66.7 mm 85.2 mm NPTF NPTF Dia PS3290202-32-32 6.75" 5.45" 3.93" 1.52" 3.06" 4.19" 2 11-1/2 2 11-1/2 171.5 mm 138.4

0.4

10 9 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 1 station 1 station 2 stations 2 stations For other commercial connectors, use a 26 pins or 20 pins with strain relief conforming to MIL-C-83503.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

P), 3/5(R) port Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 VZ One-touch fitting for 4 C4 Port size 4(A), 2(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 Courtesy of

Free Mount Cylinder Series CU

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Air Cylinder Series MB

VA T N ZZ + 2 strokes FX FZ (mm) Effective thread length (mm) Width across flats Ee11 30 35 40 45 45 55 A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9 9 12 14 FE 3 3 2 2 4 4 FT 10 10 12 12 16 16 FX 72 83 100 115 126 150 FY

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

ISO Cylinder

KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

7 240.5 5 36 13 8 245.5 7 7 40 34 270.5 39 275.5 16 25 30 40 11 7 240.5 5.5 36 16 8 245.5 9.5 7 47 34 270.5 39 275.5 30 P P1 Nil Rc 1/8 TN NPT 1/8 TF G 1/8 40 18 8 245.5 11 9 47 39 275.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1286 K series Pin Clamp Cylinder Series CKQ K/CLKQ K G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch K C 50 177 R A L P4DWSC C KQG

Refrigerated Air Dryers Series IDF/IDU

AMF (519) Compressed air outlet Port size Compressed air inlet Port size SF (D) (B) (A) SFD (128) (455) LLB Compressed air inlet Port size Compressed air outlet Port size (110) (250) AD (C) GD (A) (mm) Dimensions Mass (kg) Applicable dryer IDF22E IDF37E IDU22E IDU37E IDU55E IDU75E Port size Rc 1 1 1/2 1 1 1/2 B C D A Part no.

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

Table of Contents

Octagon Port size C B T-interface Center of F .R.L. body D A (mm) C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 AC40

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

Modular Design with Uniform Body Style

. body C A A Model P1 P2*1 A B C Applicable AC size Y24-D 1/8, 1/4 1/8 28 35 42 AC20-D Y34-D 1/8, 1/4, 3/8 1/8 31 43 53 AC30-D Y44-D 1/4, 3/8, 1/2 1/8 39 51 71 AC40-D Y54-D 1/4, 3/8, 1/2, 3/4 1/8 47 54 71 AC40-06-D Y64-D 3/8, 1/2, 3/4 1/8 62 64 90 AC50-D, AC60-D Model P1, P2*1 A B C Applicable AC size Y24-1-D 1/8, 1/4 40 35 42 AC20-D Y34-1-D 1/8, 1/4, 3/8 49 43 53 AC30-D Y44-1-D 1/4, 3/8,