Direct Operated Stainless steel Tube assembly Note) Tube assembly Note) 2 2 Stainless steel, Cu Stainless steel, Cu Stainless steel, Ag Stainless steel, C36, PTFE (NBR) Stainless steel, C36, PTFE (NBR) Stainless steel, PTFE (FKM, EPDM, FFKM) Stainless steel, PTFE (FKM, EPDM, FFKM) Armature assembly 3 Armature assembly 3 4 4 Stainless steel Stainless steel Return spring Return spring 5 5 Nut Nut C37 C37/Ni
50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to 50A 10A to 50A 10A to 25A 32A to 50A 10A 15A to 50A 10A to 50A 10A to 50A 10A to 50A 10A to 50A 1 1 Body Body CAC407 CAC407 Stainless steel Stainless steel Brass (C37) Brass (C37) 2 2 Bonnet Bonnet CAC407 CAC407 Nut O-ring O-ring Nut O-ring O-ring 3 4 5 3 4 5 Brass (C37) NBR NBR Stainless steel, NBR Stainless steel, NBR Brass (C37), Ni
Material: S (Body: 316L SS Secondary Remelt; Poppet: Ni-Cr-Mo Alloy; Diaphragm: Ni-Cr-Mo Alloy; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/
Material: S (Body: 316 SS; Poppet: Ni-Cr-Mo Alloy; Diaphragm: Ni-Cr-Mo Alloy; Nozzle: 316 SS), Ports: 3P, Connections, Inlet: 8 (NPT 1/2 inch), Connections, Outlet: 8 (NPT 1/2 inch), Gauge Port, Extra Bottom Outlet: 2 [0 to 200 psig (0 to 1.4 MPa)], Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in the Case of No Gauge), Seat Material
Then the extract was diluted with super deionized water to be subjected to a quantitative analysis on Al, Fe, Ni, Na and Ca by the stripping method. Please refer to the Series and Specifications above, as the tubing length differs depending on each size.
Construction Wetted Parts Material AK3542 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 1 Diaphragm Valves for General Applications Air Operated Type Series AK3542 & 4542 Specications Operating Parameters AK3542 AK4542 Status Normally closed (N.C.)
Please refer to page 1114. 2 ports Wetted Parts Material Specifications Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted Parts Body Surface finish Diaphragm Seat S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 AZ3542 Normally closed (N.C.)
Minimal contamination from heavy metals The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and its low sputtering yield also helps to minimize the heavy metal contamination of semiconductor wafers. Sensor New New A heat-resistant 2-color indicator solid state auto switch is available for models with a heater.
I Width across ~ flats 14 3 I I ~t~l ~across M5XO.8 ..., WIdth across flats 7 M4XO .5 ', . ~ Width a CfOSS ~X08 1~ I ~I flats 8 , ~ h NI 1\Wld!h 8C' O$5 I 1 2 . 5' '!i rj 0] o !W j j 1l flats 12 / IE Adaplor plate i!1 ~~~ Flat with rib T ~ . ~ Deep type/ zpnOD'16D only l..!.
MPaR 1 8Plated stem (Ni)
housing (with 500 VDC megger) Operating temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standards CE/UKCA marked Piping Piping specification Rc1, NPT1, G1 Rc1 1/2, NPT1 1/2, G1 1/2 Rc2, NPT2, G2 Materials in contact with fluid Aluminum alloy, PPS, HNBR (Sensor: Pt, Au, Ni
housing (with 500 VDC megger) Operating temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standards CE/UKCA marked Piping Piping specification Rc1, NPT1, G1 Rc1 1/2, NPT1 1/2, G1 1/2 Rc2, NPT2, G2 Materials in contact with fluid Aluminum alloy, PPS, HNBR (Sensor: Pt, Au, Ni
Operating temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standards CE marked (EMC directive, RoHS directive) Piping Piping specification Modular (Body size: 30) Modular (Body size: 40) Materials in contact with fluid SUS304, Aluminum alloy, PPS, HNBR (Sensor: Pt, Au, Ni
Operating temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standards CE marked (EMC directive, RoHS directive) Piping Piping specification Modular (Body size: 30) Modular (Body size: 40) Material of fluid contact parts SUS304, Aluminum alloy, PPS, HNBR (Sensor: Pt, Au, Ni
HEC-OM-S008 First edition Aug.2014 Rev1.2 May.2017 C Co om mm mu un ni ic ca at ti io on n M Ma an nu ua al l THERMO-CON Model No. HECR series Keep available whenever necessary.
SU PER M I ST SEPARATO R Seri es AM E W ARN I N G Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent Keep f ol l ow i ng t o operat e Super m i st separat or properl y. O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent .
M I CRO M I ST SEPARATO R Seri es AM D W ARN I N G Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent *N . C. aut o drai n: M i n. 0. 15 M Pa Keep f ol l ow i ng t o operat e M i cro m i st separat or properl y. *N . O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage.
Fi l t rat i on rat i ng0. 3 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et oi l m i st concent rat i on: 0. 8 ppm ( Fi l t er i nl et : 24ppm ) M I ST SEPARATO R Seri es AM Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent *N . C. aut o drai n: M i n. 0. 15 M Pa *N .