SMC Corporation of America
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Refer to catalog N366 Series Variations @ Boq1" l N m ) L lg) 10 16 20 25 32 40 50 MHY2NOD 10 0 . 1 6 71 70 MHY2N60 1 6 0.54 84 150 MHY2-MD 20 1 . 1 0 106 3m MHY2.25D 2.24 560 MHw2 Rack Style Unique seal design Grippng force when allows shorter total length construction and constant opening and closing fingers.

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

0.10 0.10 0.10 P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.1 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.08 0.08 0.08 P1 = 0.5 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.3 MPa Pressure drop (MPa) P1 = 0.3 MPa P1 = 0.1 MPa 0.06 0.06 0.06 P1 = 0.1 MPa P1 = 0.3 MPa 0.04 0.04 0.04 0.02 0.02 0.02 0 0 2000 1000 3000 4000 Flow rate (l/min (ANR)) 00 00 500 1000 1500 Flow rate (l/min (ANR)) 50 100 150

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

ArbIe S SpeCifications IpPlJca eries Maximum Stroke How to Order r" p ' ~~nci~ril ni,Q'd, j,lno. . .' 1 -XC68 Sefies ~ ,..o.;Sc(;p.iiin ;Mod'oij Action Piston rod Standard type CS2 Double acting single rod eS2 CS2W Double acting double rod Smooth cylinder CS2Y Double acting Single rod Other specifications Same as standard type and dimensions mm Double functioning .

Operating temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standards CE marked (EMC directive, RoHS directive) Piping Piping specification Modular (Body size: 30) Modular (Body size: 40) Materials in contact with fluid SUS304, Aluminum alloy, PPS, HNBR (Sensor: Pt, Au, Ni

to page 389 for details. 348 Regulator Series AR10 to AR60 Regulator with Backflow Function Series AR20K to AR60K Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AR30(K) Rc 3/8 AR50(K) Rc 1 AR10 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 25 50 75 100 125 150

AL AW AG AV AF800 AF900 369 Series AW10 to AW60 Series AW20K to AW60K Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AW10 Rc 3/8 AW30(K) AW40(K)-06 Rc 3/4 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 1000 Flow rate (l/min (ANR)) 0 3000 4000 1000 2000 0 150 125

Its maximum operating temperature is 150? C. KQB2 fittings can be used with fluid, and in environments having a large temperature change. Configuration variations have been improved to 17 models. Applicable tube sizes are +3.2 to +16 and 1/8" to 1/2".

/8 18.5 87 13 20 3 4 160 179 40 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 22.5 108 16 20 5 0 182 205 9 Hydraulic Cylinder: 7MPa Series CHN Accessories (Standard) Rod end nut Material: Carbon steel Mounting nut Material: Carbon steel 30 30 d d C D C D H B H B Part no. d H B C D Applicable bore size (mm) Part no. d H B C D Applicable bore size (mm) SO-02 SO-03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI

K (D) 2 x Port size DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit U V E Applicable cable 6 to 12 U E 300 U E G1/2 500 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42 132 21 54.5 46.5 72 60 60 90 2 150.3 35.5 42 150

Applications: Marine environments Water splash zone in various processes Washdown in food plants (non-food or splash zone only) Related Products: KQG Series 316 SUS One-touch Fittings Coming Soon: KQG2 KQB2 Series Ni plated brass One-touch Fittings (Coming Soon) ASG Series 316 SUS One-touch Speed Controls CG5 Series repairable 304 SUS Cylinder NCM Series with X6009 option crimped

underplating)) RJ45: CuSn (Au plating (Ni underplating)) CuZn (Au plating (Ni underplating)) CuSn (Au plating (Ni underplating)) Connector material TPU (UL94 HB) PA66 (UL94 V0) Material of sheath (Sheath color) PUR (Blue (RAL 5021 equivalent)) PVC (Green (RAL 6018 equivalent)) Weight 1 m: Approx. 70 g 2 m: Approx. 116 g 3 m: Approx. 161 g 5 m: Approx. 252 g 10 m: Approx. 479 g Approx. 350

O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .

O nl y use a equi pm ent w i t h a m i ni m um l oad i m pedance of 1k .