Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

8 to 500 30 to 1200 20 to 1000 10 to 500 401 to 500 20 to 1100 12 to 750 6 to 400 24 to 1300 16 to 950 8 to 500 30 to 1200 20 to 1000 10 to 500 501 to 600 20 to 900 20 to 540 20 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 1000 10 to 500 601 to 700 20 to 630 20 to 420 20 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 900 10 to 440 Speed [mm/s] Stroke 701 to 800 20 to 550 20

Compact Electric Actuator Series LG1

-F 100 200 300 400 500 600 700 800 900 1000 1200 245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250 350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions inside ( ) are for a 100mm stroke. 4 Series LG1H High Rigidity Direct Acting Guide Type LG1H20: Without Coupling / Construction

Environment

Work load [kg] Work load [kg] 40 30 Lead 8: LEY32DB Lead 10: LEY32B 30 20 24 19 Lead 16: LEY32DA 20 Lead 20: LEY32A 10 12 9 10 0 200 400 600 800 1000 1400 1200 0 0 200 400 600 800 1000 1200 0 Speed [mm/s] Speed [mm/s] LEY63 (Motor mounting position: Top/Parallel, In-line) 120 Lead 2.86: LEY63L (Top/Parallel type only) 100 Lead 5: LEY63C Work load [kg] 80 Area where the regeneration option

MY1

Support brackets are not for mounting; use them solely for providing support. m 90 MY1C63 MY1C63 MY1C63 MY1C63 80 (1600) (1600) (1600) (1600) (1600) (1600) 70 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 MY1C50 l l 60 (1400) (1400) (1400) (1400) (1400) (1400) MY1C40 MY1C40 MY1C40 MY1C40 50 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 MY1C32 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1C25 MY1C25 MY1C25 MY1C25

DOC1023125

225 401 to 500 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220

CG5-S

109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500 110 M12 x 1.75 depth 23 131 40 37 41 19 M12 x

Cylinder with Lock

88 9 20 120 58 144 67 6 30 76 241 58 19 66 1/4 stroke 240 52 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 71 10 40 92 263 58 19 66 258 1/4 stroke 52 1001 to 1200 1001 to 1400 124 13.5 28 164 84 198 87 12 45 112 317 80 21 80 1/4 stroke 310 65 1001 to 1400 1001 to 1500 140 13.5 29 180 100 220 89 12 50 136 347 80 21 81 339 1/4 stroke 65 1001 to 1500 When machining a hole to put a bellows

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost

Thermo-con/Rack Mount Type

1600 1600 Ambient temperature 15C 1400 1400 Cooling capacity [W] Cooling capacity [W] 1200 1200 Ambient temperature 25C Ambient temperature 25C 1000 1000 800 800 600 600 400 400 Ambient temperature 35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR008-A Circulating fluid: Tap water Circulating fluid: Ethylene

CG5-S

Double acting single rod Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 0.05MPa Without auto switch: 10 to 70C, With auto switch: 10 to 60C Ambient and fluid temperature Cushion Rubber bumper, Air cushion 50 to 1000mm/s 20 to 63 Piston speed 80, 100 50 to 700mm/s Thread tolerance JIS class 2 +1.4 0 +1.5 0 +1.4 0 +1.5 0 20 to 63 to 1000 mm, to 1200

CJ5-S

35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 40 37 41 19 M12 x 1.75 24 60

CJ5-S

35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 130 201 100 Up to 1500 110 40 37 41 19 M12 x 1.75 24

RHC

RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke), even they are available.

CA2

For Long Stroke Bore size (mm) 40 Stroke range (mm) RT RY 501 to 800 RY 601 to 1000 50 76 30 1001 to 1200 601 to 1000 63 1001 to 1200 92 40 751 to 1000 80 RT 1001 to 1400 112 45 751 to 1000 100 1001 to 1500 136 50 Stroke range (mm) A Bore size (mm) 40 50 63 80 100 B B1 C AL D E F G H1 J K KA LD LH LS LT Without rod boot With rod boot 60 9.0 up to 500 20 to 500 30 27 22 44 16 32

CL

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Long stroke Bore size (mm) Stroke range (mm) 40 RT RY 50 to 100 501 to 800 601 to 1000 1001 to 1200 601 to 1000 1001 to 1200 751 to 1000 1001 to 1400 751 to 1000 1001 to 1500 1401 to 1600 1401 to 1600 1401 to 1600

AC Servo Motor Driver (Pulse input type/Positioning type ）

rating limit Static Varistor voltage rating voltage capacity Power supply (range) (reference Varistor Surge V1 mA Permissible circuit Energy Rated pulse value) voltage current voltage immunity power [A] [V] immunity AC [Vrms] DC [V] 8/20 s [A] 2 ms [J] [W] [pF] [V] TND20V-431K 275 350 10/1 times 195 710 1300 430 (387 to 473) 200 V 1.0 100 class TND20V-471K 300 385 7000/2 times 215 775 1200

Ionizer Gun

1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 7)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

22 or less 1 4 1 8 Double 1200 13 or less VFS2230 VFS2220 0.35 1 4 1 8 1 4 1 8 1 4 1 8 1 4 Closed center VFS2320 VFS2330 0.42 600 40 or less Exhaust center VFS2420 VFS2430 600 40 or less 0.42 Pressure center VFS2530 VFS2520 0.42 600 40 or less Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Guide Cylinder Series MGG

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

LJ1H

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.