RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

LEF-OM002xx

Specification 2.1 Slider type LEF Series / Ball screw drive Specification (1) Step motor (servo 24VDC) Ball screw drive LEFS16 LEFS25 LEFS32 Model 50 to 500 50 to 800 50 to 1000 Stroke [mm] Note1) 14 15 12 25 30 20 45 50 LECP6/LECP1/LECPMJ/JXC91 Work load [kg] Note2) Horizontal 9 10 10 20 20 15 40 45 LECPA 2 4 0.5 7.5 15 4 10 20 Vertical 500 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400

JXCx-OMT0005CN

TB PLC 0 No. 3 ABS 1 INC 2 *1 (mm/s) (-) (+) mm 42 - 1 mm/s 2 1 mm/s 2 100% * *1 0 1100 1100 INP ON INP ON *1 1100 ( mm/s) *1 * *1 (mm/s) * (-) (+) AREA ON mm 1122 AREA ON 1 1 *1(1)2(2) 1=2=0 AREA OFF 2 2 (-) (+) 43 - mm mm INP ON INP ON *1 * INP ON () INP ON *1 44 - 11.2 ID ID 132 ID () IO IO * [64 ] * [] S S * (+) (+) *1 + mm (-) (-) *1

SFOD-OMT0005CN

Movement mode Movement mode 3 ABS 1 () INC 2 Speed Speed *1 (mm/s) Position Position (-) (+) [mm] 1 (mm/s 2) Accelerati on Accelerati on Decelerati on Decelerati on 1 (mm/s 2) 100% (%) * Pushing force Pushing force *1 0 1100 (1100 ) INP ON INP ON (:%) Trigger LV Trigger LV *1 -42- (1100 ) ( mm/s) * Pushing speed Pushing speed *1 Moving force Moving force *1 (%) (mm/s)

SFOD-OMT0009CN

] 500 500 500 600 700 800 600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100

JXCx-OMU0026

1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] (Independent and interpolation) 30 20 10 Min. speed [mm/s] (Speed tuning control) 49 33 17 -112No.

Step Motor Driver （ Pulse input type ）

LEFS25 LEFS32 LEFS40 Lead [mm] 10 5 20 12 6 24 16 8 30 20 10 No. 0 0 0 0 Movement MOD ABS ABS ABS ABS to 500 500 250 1000 500 250 1200 500 250 500 500 250 Speed Strok 501-600 900 500 250 1200 500 250 500 500 250 601-700 630 420 230 930 500 250 500 500 250 701-800 550 330 180 750 500 250 500 500 250 801-900 610 410 200 500 500 250 901-1000 500 340 170 500 500 250 Step data default 1001-1100

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

1100 1100 1750 110 130 110 180 140 220 4700 4300 3450 2400 1950 1750 1750 1750 2750 2

Air Slide Table

1100 1100 1750 110 130 110 180 140 220 4700 4300 3450 2400 1950 1750 1750 1750 2750 2 Air Slide Table/Reversible Type Series MXQR Optional Specifications Adjusters Three different types of adjusting bolt have been standardized for extension stroke end, retraction stroke end and both ends adjuster and cushion mechanisms.

Vacuum System Peripherals:

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

MXQ

1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends) Optional wide adjustment range adjuster are available with rubber stopper and metal stopper.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

Modular F.R.L. Units

1100 200 450 Rated flow (L/min (ANR)) Note 1) Polycarbonate Bowl material Bowl guard Standard (Polycarbonate) Semi-standard (Steel) Relieving type Regulator construction 0.82 1.26 1.42 0.38 0.67 Weight (kg) Note 1) Conditions: Mist separator inlet pressure: 0.7 MPa; The rated flow varies depending on the inlet pressure.

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

Air Slide Table Series MXQ

1100 1100 1200 1400 2350 2650 2900 1750 130 65 80 310 166 + 0.5S 110 140 180 220 1750 1750 1750 1950 2400 3450 4300 4700 2750 200 110 130 560 240 + 0.5S Option Specifications Stroke Adjustment Range of Adjuster Options (Identical for extension and retraction ends) Type Stroke adjustment range Optional wide adjustment range adjusters are available with rubber stopper and metal stopper.

IZx-OMT0049

50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 30 50 to 200 50 to 1300 50 to 2000 50 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 effect before installing. 3-1-5.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1 220 LE-CA-3 420 LE-CA-5 700 LE-CA-8 1100 LE-CA-A 1370 LE-CA-B 2050 LE-CA-C 2720 Connector B terminal no.