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5 6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2

ZP

31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter will be made by

SQ1000/2000

(latching) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 2 2 position double (double solenoid) Note 1) Lead wire is not included.

JXCx-OMT0023

PC09) is invalid. 2. ON: Lock is not activated.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

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Note 2) X129 is for Series ZYX3000 and X130 is for Series ZYY3000.

0.4

single 2(B) (A)4 1 F (R1)5 1 (P) 3(R2) kit 2 position double (Double solenoid) (1) 2(B) (A)4 2(B) (A)4 P 2 Lead wire is not included.

Smooth Cylinder/Low Speed Cylinder

+ 15 (n-2) (n = 4, 6) Note 5) D-A79W 15 10 D-F7 D-J79 15 + 15 (n-2) (n = 4, 6) Note 5) 5 5 D-F7V D-J79C D-F7W/J79W D-F79F D-F7NT 10 + 10 (n-2) (n = 4, 6) Note 5) 5 5 15 + 20 (n-2) (n = 4, 6) Note 5) 15 10 10 + 15 (n-2) (n = 4, 6) Note 5) D-F7WV 15 10 Note 4) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

Base Mounted Metal Seal/Rubber Seal Series VQ

EX121-SMB1(-XP) (5) EX121-STA1(-XP) (5) EX121-SSH1(-XP) (5) EX121-SPA1 EX121-SUW1(-XP) (5) VQC EX121-SAB1(-XP) (5) SQ EX120-SUH1(-XP) (5) q EX121-SSL1(-XP) (5) EX121-SSL2(-XP) (5) VQ0 EX121-SFU1(-XP) (5) EX121-SDN1 EX121-SCS1(-XP) (5) VQ4 EX121-SCS2(-XP) (5) VQ5 EX120-SMJ1(-XP) (5) AXT100-2-P (2) U S w e r t U S U S AXT100-2-F (2) U S VQZ AXT100-2-TB1 (4) AXT100-2-TB2 (4) VQD Note 1) A

42

(A) 4 (B) 2 VQ4151 VQ4150 VP4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551

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5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

Step Motor Controller

Without cable 1.5 m 3 m 5 m Note) DIN rail is not included.

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2 !3 !4 !5 !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note 2) Value when manifold base (5 stations) is mounted, with single action 2 position type.

HRX-OM-M005

HRZD Series 5.3 Operation Screen 5-7 HRX-OM-M005 Chapter 5 Product Operation 5.3.5 CH1(2) setting data screen 3 The CH1(2) setting data screen 3 is displayed only if the DI control kit (optional) is provided. 4 1 4 2 4 3 5 6 Figure 5-9 CH1(2) Setting Data Screen 3 Table 5-7 CH1(2) Setting Data Screen 3 No.

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

Electric Actuator

PNP Produced upon receipt of order (Robotic cable only) Refer to the specifications Note 2) on pages 22 and 23. 5 m 2 LECP1 2 1 When Without controller/driver is selected for controller/driver types, I/O cable cannot be selected.

Electric Actuator/Slider Type

2 @8 !6 o A !5 @7 A !0 @2 @4 @5 @6 !4 !3 A-A w Motor bottom mounting type is the same. Component Parts No. Description Material Note No.

Battery-less

Dowel pin hole Origin mark 2 2 5 5 5 5 5 2 Return to origin end position [Stroke end] 2 2 90 90 180 L 0 E 2 R 3 5 / 0 T 2 3 [Return to origin end position] 2 Return to origin end position 2 Return to origin end position 2 3 [Return to origin end position] a 1 bl e e o g p n er ra at g in * The figures show the origin position for each actuator. *1 This is the range within which the table