Mounting: G (Rear Flange), Bore Size: 25 mm, Cylinder Port: M Thread: 20, 25 Bore; Rc: 32 to 63 Bore, Stroke: 20 mm, Rotation: L (Left Rotation), Body Option: Standard (Female Thread), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Mounting: Through Hole Both Ends Tapped Common, Bore Size: 25 mm, Cylinder Port: M Thread: 20, 25 Bore; Rc: 32 to 63 Bore, Stroke: 20 mm, Rotation: Left Rotation, Body Option: Standard (Female Thread), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Mounting: Through Hole Both Ends Tapped Common, Bore Size: 32 mm, Cylinder Port: NPT, Stroke: 20 mm, Rotation: Left Rotation, Body Option: Standard (Female Thread), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Pressure(MPa): 1, Additional Function: No (Standard), Rotating Direction: Left, Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～60, Auto Switches: M9B, Lead Wire Length(m): 0.5, The number of the switches: 2, Specification: Built-in magnet, Port Screw Type: M thread, Made to order specifications: None

Pressure(MPa): 1, Additional Function: No (Standard), Rotating Direction: Left, Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～60, Auto Switches: M9B, Lead Wire Length(m): 0.5, The number of the switches: 2, Specification: Built-in magnet, Port Screw Type: M thread, Made to order specifications: None

4-channel Flow Monitor ( compatible)

gal/min 0.00 to 3.53 0.00 to 3.70 PD 0 to 1000 0 to 1050 Flow L/min 0 to 200 0 to 210 200 L Flow gal/min 0.0 to 7.1 0. to 7.4 PD 0 to 1000 0 to 1050 Flow L/min 0 to 500 0 to 525 500 L Flow gal/min 0.0 to 17.6 0. to 18.6 PD 0 to 1000 0 to 1050 Flow L/min 0.40 to 4.00 0.25 to 4.50 4 L Flow gal/min 0.11 to 1.06 0.07 to 1.19 PD 100 to 1000 63 to 1125 Flow L/min 1.8 to 20.0 1.3 to 21.0 PF2D5 20L

PFxx-OMO0007CN

1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 5 L/pulse 5F.S. 3 7 OUT1ON OUT2ON DC1224 V10 () 150 mA 160 mA 170 mA -35No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 IP65 050 -2585 () 3585R.H.() 3F.S.(1535 )5F.S.(050 ) AC1000 V1 50 M(DC500 V ) CERoHS (RcNPTG) 1/81/4 3/8 1/2 ADCNBRSUSPBTPtlrFeNiOFC 250 g 290 g 100 g 1 0.927= 20L

Digital Flow Switch (Remote type monitor unit)

PF2A30 series PF2A31 series 1 to 10 L/min type (PF2A510) 5 to 50 L/min type (PF2A550) [11L]: [21L]: [51L]: 10 to 100 L/min type (PF2A511) 20 to 200 L/min type (PF2A521) 50 to 500 L/min type (PF2A551) [10L]: [50L]: PF2W30 series PF2W33 series [11L]: 10 to 100 L/min type (PF2W511) 0.5 to 4 L/min type (PF2W504) [04L]: [20L]: [40L]: 2 to 16 L/min type (PF2W520) 5 to 40 L/min type (PF2W540) PF2D30

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)

LFE-OMZ0012

. -10No.LFE*-OMZ0012 Model Indication and How to Order LFE Z Isolation Specifications Symbol OUT2 Rated flow range Symbol Content Nil Not isolated 1 0.5 20L/min Z Isolated 2 2.5100L/min 3 5200L/min Output Specifications Options Symbol OUT2 Symbol Lead wire and M12 connector Bracket J Analogue 1 to 5V K Analogue 4 to 20mA Nil Yes 1 2 Yes Yes 3 Yes Thread type Port size Symbol Content Rated

IZS30_eng

.: static elimination time for 3kV0.3kV FE W G0E E XSYZ XSY XSY XSY ZZ ZZ GFE ZZ H E E Ionizer depth direction (with air purge) Ionizer width direction ] with air purge ^ Air purge amount : 20l /min ANR Surface potential Sensor : N/A Op.

Process Pump

Specifications and how to order Specifications Model PAF3410 Actuation Automatically operated Main fluid: Suction/Discharge port RcGNPT 3/8 Female thread, 1/2 Tube extension, With nut (size 4, 5) Port size Pilot air: Supply/Exhaust port Rc, G, NPT 1/4 Body wetted areas newPFA Material Diaphragm/Seal PTFE Check valve newPFA, PTFE Discharge flow rate 1 to 20L/min Average discharge pressure

HEC-OM-S019

Keep the flow rate 20L/min Temperature rises and falls +/-1 to 2 C gradually about the set point temperature. PID parameters are set incorrectly. setting Cause / Measure DC output voltage of product is reduced. Check the power voltage. Code Description Manner of reset ERR19 Abnormal auto tuning alarm Stop Overloaded during auto tuning mode Avoid overload.

LEH_C

() (40%) INP 1) INP ON 0.50 2) ()INP ON a) b) INP ON c) INP ON 21 - INP SV1.0* () INP ON SV0.6* a.40%() () INP ON b. 40% ON INP OFF LEHZ LEHZJ LEHF LEHS SV10 [mm/sec] () 4150 50% 100% 540 40% 100% 3150 70% 100% 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L

LV50-OMQ0004

. -10No.LV50***-OMQ0004-F Model Indication and How to Order LFE Option Body size (Flow rate range Symbol Content Symbol Lead wire Bracket 1 0.5 20L/min Nil Yes 2 2.5100L/min 1 3 5200L/min 2 Yes Yes 3 Yes Output Specifications Symbol OUT2 J Analogue 1 to 5V K Analogue 4 to 20mA Thread type Piping port size Symbol Description Rated flow range Symbol Port size Nil Rc 1 2 3 N NPT 3 3/8 Yes F

Hydraulic

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 3.2 x 16l 14 5 20 18 M8 x 1.25 36 16 9 20 CDP-1 9 +0.058 0 Y-03 +0.2 +0.1 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

ARJ310

Downstream pressure MPa Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l

AMR3000 to 6000

0 q w e r Valve ass'y Valve spring O ring Gasket Polyacetal Aluminum alloy Note 1) The MC cartridge element and the separation element are integrated. 1.9-2 AMR3000 to 6000 Precautions Flow characteristics Pressure characteristics Condition: Supply pressure 0.7MPa Conditions: Supply pressure 0.7MPa, Secondary pressure 0.2MPa Flow 20l/min (ANR) Be sure to read before handling.

Proposals for Energy Saving

Port size Rc 3/8 Pressure 1.0MPa 0 VBA2100/2200 VBA4100/4200 04 Rc 1/2 Related products Model Description Note VBA1110/1 VBA2100/2200 VBA4100/4200 VBA4200-04 AM250-02 AM450-04, 06 AM550-06, 10 Page 4.6-1 (Best Pneumatics No.4) Mist separator AMC310-03 AMC510-06 AMC610-10 35dB or more noise reduction Exhaust cleaner Air operated type VBAT05 (5l, Directly connected to booster valve) VBAT20 (20l

Interface Regulator for VQ4000 5 Port Solenoid Valve

ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure Characteristics Conditions Upstream pressure: 0.7MPa (101 psi) Downstream pressure: 0.2MPa (29 psi) Flow rate: 20l