Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm, Option: Standard (w/Urethane Bumper), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Bore Size: 16mm, Thread Type: Bore 8-16: M Thread, Bore 20-25: Rc, Stroke: 100mm

1

V A93V A93 A93V A93 V V V No 100 V or less A90V A90 A90V A90 V V IC circuit Relay, PLC 24 V 12 V 2-wire Yes C73C A73C V V V V Connector No 24 V or less C80C A80C V V V V IC circuit Diagnostic indication (2-color indication) Grommet Yes A79W V V Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

High Vacuum Angle Valve

100 160 Switch Heater Indicator High-temperature type XLA-100/160-X152 Single acting (N.C.) 106 to atmospheric pressure 1010 1011 XLC-100/160-1-X152 Double acting 1 When the standard seal material (FKM) is used XLA/C-100/160(-1)-X152 18-E692 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal XLA-100/160-X152 How to Order XLA 100 w e r q X152 A M9N u t y Improved durability of

Table of Contents

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Free Mount Cylinder

Weight/( ): Denotes the values with D-A93.

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

Table of Contents

to 100 MGPL32 to 100 i !

Table of Contents

Caution 5 150 100 200 300 1.

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment: