Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 1 pc.

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m, M8-4 Pin, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

Vacuum Module Series ZX

If an adsorption confirmation switch is replaced for a vacuum switch on ZX100-K15LZ-PBC, indicate as ZSE2-0X-15C-D. In this case, mounting screws P3270148-39 (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. Ex.)

ZSE2/ISE2

port 7 35.6 Pressure setting trimmer Pneumatic circuit 600 (3000) + O 32 59 58 10.2 PV 6.5 18 V 8 10 17.6 10 5.5 2-3.3 Mounting hole Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 16-6-11 6 Series ZSE2/ISE2 01 T1 Dimensions/Standard Type: ZSE2Grommet type: ZSE2-15 01 T1 Connector type: ZSE2-15C 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2 x M2.5 x 41L Mounting thread 25 25 2 x M2.5 x 41L Mounting thread 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C

1.1

property value Conventional unit system Density [kg/l] Specific heat C [kcal/(kgfC)] Specific heat C [kJ/(kgK)] Weight: volume ratio [kgf/l] Temperature 1.02 1.02 0.93 3.91 5C 1.02 1.02 0.93 3.91 10C 1.02 1.02 0.93 3.91 15C 1.01 1.01 0.93 3.91 20C 1.01 1.01 0.93 3.91 25C 1.01 1.01 0.94 3.91 30C 1.01 1.01 0.94 3.92 35C The above shown are reference values.

Thermo-con

Cooling Capacity HEC002 HEC006 Circulating fluid: Clear water Circulating fluid: Clear water 800 1400 700 1200 Ambient temperature: 59 (15C) 600 1000 Cooling capacity (W) Cooling capacity (W) Ambient temperature: 59F (15C) 500 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 800 Ambient temperature: 68F (20C) 400 600 Ambient temperature: 77F (25C) 300 Ambient temperature:

Water-cooledThermo-chiller

Temperature range which can be set with the Thermo-chiller 10C to 35C Example) Facility water temperature of customers machine: 15C Temperature difference between the circulating fluid and facility water is: 50 15 = 95F (35C). 4.What is the kW for the required cooling capacity?

Thermo-chiller

The operating temperature ranges of the circulating fluid are as follows: 15 to 25C for CH1, and CH1 + 0 to 15C for CH2 When the amount of heat generated from the customer equipment is greater than the products capability, the circulating fluid temperature may exceed these ranges. Use caution regarding this matter. 1.

HRX-OM-K003

C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 15 30 40 (1.1 [gal]/min) (4.0 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 15 25 40 (2.6 [gal]/min) (4.0 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Flesh water, DI water 0.35 /

Metal Seal/Rubber Seal Series VQ Body Ported

Wire Color by Terminal No. of D-sub Connector Cable Assembly Wiring Specifications Dot marking Lead wire color Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink None None None None None None None White Black Black Red Red Red Black Black AXT100-DS151 to 3 Multi-core vinyl cable VVRF 0.3 mm2 x 15C 9 Plug

Lightweight and Compact

During transportation/storage: 15C to 50C, 15% to 85% (But as long as water or circulating fluid are not left inside the pipings) During operation: 5C to 45C, 30% to 70% (However, use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature or circulating fluid temperature is 10C or less.) 6. In locations where condensation may occur. 7.

HRS100/150

1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x

energy saving effect

1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x

53

During transportation/storage: 15C to 50C, 15% to 85% (But as long as water or circulating fluid are not left inside the pipings) During operation: 5C to 45C, 30% to 70% (However, use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature or circulating fluid temperature is 10C or less.) 6. In locations where condensation may occur. 7.

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m)