Smooth Cylinder/Low Speed Cylinder

CDQ2YB325 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB405 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB5010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB6310 15 20 25 30 35 40 45 50 75 -100 CDQ2YB8010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB10010 15 20 25 30 35 40 45 50 75 -100 CQ-M8 x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L CQ-M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L

NCG/CG1

st or more 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st Trunnion style is not available for bore sizes 80 and 100.

Air Cylinder Series MB

75 75 75 75 75 60 54 36 23 12.5 12.5 12.5 12.5 12.5 12.5 10 136 144 152 152 164 164 170 56 41 23 64 51 25 64 51 25 68 56 29 76 61 29 82 75 27 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

Air Cylinder

, 100, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

NCM

0.7 and the operating pressure of 75 PSI.

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

Made to Order

Note 2) Dimensions inside ( ) are for 75, 100st.

Electric Actuator/Slider Type

Duty ratio: 75% 5000 5000 2500 2500 0 0 0 5 10 15 20 Work load [kg] 0 5 10 15 20 Work load [kg] LEFS25S A LEFS25/Ball Screw Drive: Vertical LEFS25S B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 17500 17500 Duty ratio: 50% 15000 15000 12500 12500 10 10 7500 7500 Duty ratio: 75% 5000 5000 Duty ratio: 75% 2500 2500 0 0 0 2 4 6 8 Work load [kg] 0

Table of Contents

MHS4-32D MHS4-32D 75 75 Pressure 0.6 MPa Pressure 0.6 MPa 60 60 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 45 45 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 15 15 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) F F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

Air Cylinder Series CA2

, 4, 6, 8, ) Same surface 1 10 80 90 75 20 100 Different surfaces Same surface 75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 + 35(n 2) (n = 2, 3, 4, ) 75 + 35(n 2) (n = 2, 4, 6, 8, ) 80 + 35(n 2) (n = 2, 4, 6, 8, ) 90 + 35(n 2) (n = 2, 4, 6, 8, ) n Different surfaces 100 + 100(n 2) (n = 2, 3, 4, 5) 100 + 100(n 2) (n = 2, 4, 6, 8, ) Same surface 1 10 75 80 90 20 55 Different surfaces Same

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25lV6B/Ball Screw Drive LEFS25lV6B/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Free Mount Cylinder Series CU

21 C D U 16 30 D M9B Cylinder stroke (mm) Copper, fluorine and silicon-free + low particle generation Number of auto switches 2 pcs. 1 pc. n pcs.

15

Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 40 50 60 70 80 0 10 20 30 40 50 Work load [kg] Work load [kg] These graphs are examples of when the standard motor is mounted.

Air Cylinder

st or more 10 st or more 15 to 74 st 75 st or more D-B59W 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion type is not available for 80 and 100.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

High Vacuum Angle Valve

(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

CQS

100 75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL