Thermo-chiller/Rack Mount Type 500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800 Watercooled refrigeration Particle filter element for replacement (UL Standards) Applicable to DI water piping Air-cooled: Option U (Water-cooled: Standard) HRR024 2000/2400 Tap water 15% ethylene glycol aqueous solution 550
LOCK UNIT, TIE ROD CYLINDER W/LOCK
Applicable strokes: 450, 550, 650, 750, 850, 950 Example) LG1H2021PC-550-F2-X2 500 8.5 13.3 600 9.3 14.5 700 10.1 15.8 800 10.9 17.1 900 11.7 18.3 1000 12.5 19.6 mm kg kg Standard stroke Aluminum Stainless steel Body weight Operating temperature range 5 to 40 (with no condensation) 30 90 C kg N mm/s mm Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning
300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 3.09 3.29 3.49 3.69 3.89 4.09 4.29 4.49 4.69 4.89 5.09 5.29 5.49 5.69 5.89 6.09 6.29 6.49 6.69 6.89 Additional weight with lock [kg] 0.58 Series EQFS40R L Stroke [mm] 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Product weight [kg] 5.15 5.43 5.71 5.99 6.27 6.55 6.93 7.11
fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50
), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8
), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8
O ut put area I nput area W o rd d ata area In p u t w o rd d ata Rem arks W o rd d ata area O u tp u t w o rd d ata Rem arks RW w 0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW r0 b15, b14, b1, b0 b 1 1b 0100% F.S. RW w 1 U nused RW r1 U nused RW w 2 U nused RW r2 U nused RW w 3 U nused RW r3 U nused O ut put dat a occupi es 4 w ords, but uses onl y t he 1st w ord act ual l y.
Stroke Standard/Produced upon receipt of order 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200 1300 1400 1500 LEMH25 LEMH32 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200 1300 1400 1500 LEMH25 LEMH32 Please consult with SMC as all non-standard and non-made-to-order strokes are produced as special orders.
Applicable strokes: 450, 550, 650, 750, 850, 950 Example) LG1H2021PC-550-F2-X2 500 8.5 13.3 600 9.3 14.5 700 10.1 15.8 800 10.9 17.1 900 11.7 18.3 1000 12.5 19.6 mm kg kg Standard stroke Aluminum Stainless steel Body weight Operating temperature range 5 to 40 (with no condensation) 30 90 C kg N mm/s mm Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 Positioning
LAT LZ LC3F2 Weight Model LEFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 1.50 1.70 1.80 2.00 2.10 2.25 2.40 2.55 2.70 2.80 2.90 3.10 3.35 3.50 3.65 3.80 Model LEFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 2.40 2.60 2.80 3.00 3.20 3.40 3.60 3.80 4.00 4.20 4.40 4.60
Weight Series LEFS25 V6 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 Product weight [kg] 2.06 2.20 2.34 2.50 2.62 2.75 2.90 3.05 3.18 3.30 3.46 3.60 Additional weight with lock [kg] 0.3 Series LEFS32 V7 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 3.40 3.60 3.80 4.00 4.20 4.40 4.60 4.80 5.00 5.20 5.40 5.60 5.80 6.00 6.20 6.40
rate 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} 1/4 3/8 Port size 0.78 (0.91) 0.81 (0.94) 0.78 (0.91) 0.81 (0.94) 0.78 (0.91) 0.8 (0.94) Mass kg (With bracket) Model Specifications IDG60LA IDG75LA IDG100LA IDG60SA IDG75SA IDG100SA Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard
Cv Effective area (mm2) Model Construction/Components AC AC, DC 1.0 0.5 0.3 1.0 0.5 0.3 VX311 -01 0 2 4 VX312 -01 0 2 4 VX313 -01 VX311 -02 1.5 2.2 3 1.5 0.08 0.16 0.24 0.08 0.16 1.4 2.8 4.3 1.4 2.8 0.6 0.3 0.2 0.6 0.3 0.6 1.0 0.2 0.3 0.6 0.15 0.3 0.6 1.0 0.3 0.6 0.15 0.3 1 8 (6A) 0 2 4 0 2 4 0 2 4 VX312 -02 330 2.2 VX3224-02 VX3324-02 550 700 330 550 700 550 700 550 700 550 700 550 700
Flow rate Power consumption Operating frequency 100 Hz 500 Hz 1000 Hz 80 W 1200 Hz Low flow type 50 L/min 40 W 1000 Hz 10 W 550 Hz 4 W 350 Hz 80 W 650 Hz Medium flow type 100 L/min 40 W 550 Hz 10 W 300 Hz 4 W 200 Hz 80 W 600 Hz High flow type 150 L/min 40 W 500 Hz 10 W 250 Hz 4 W 150 Hz VCH VDW SX10 SX10 Select a model according to applications and purposes.
ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2
Symbol Shape UT Thin flat Note thatMapplies only to cup form: JT2.
Symbol Shape Nil Without cup UT Thin flat Note thatMapplies only to cup form: JT2.
ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2
ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2