AC Servo Motor Driver

(Example) Limited to 100[ms] since During acceleration: 100[ms] 20 20 100[ms] 200[ms]. 200[ms] as set since During deceleration: 200[ms] 20 5000 400[ms] 200[ms].

Fieldbus system EtherCAT compatible SI Unit

signal. 15 ms Unit 100 ms 200 ms Generates error when the operation count exceeds the set value. 3 Enable Generates an error.

V100

S070 VQ Flow Specifications/Response Time VKF Flow characteristics Response time ms Note 2) Maximum operating pressure Power consumption b 0.27 0.28 0.27 0.28 0.27 0.28 ON 3 or less 5 or less 3 or less 5 or less 3 or less 5 or less Cv 0.011 0.021 0.011 0.021 0.006 0.011 OFF 3 or less 3 or less 3 or less 3 or less 6 or less 6 or less C[dm3/(sbar)] 0.042 0.083 0.042 0.083 0.021 0.042 VQZ 0.5

Fieldbus system DeviceNet TM compatible SI unit

1=1.0 ms 2=10 ms 3=20 ms 6Ah Get/Set Input filtering time Digital I, I/O USINT 0=1.0 ms 1=15 ms 2=100 ms 3=200 ms Digital input extension time 6Bh Get/Set USINT Digital I, I/O 0=Offset binary 1=Sign and Magnitude 2=2s complement 3=Scaled 6Ch Get/Set Analogue data format Analogue I, O, I/O USINT (Scaled cannot be set for analogue input) Monitoring the power supply voltage (For control and

EXxx-OMN0029CN

EDS Enable (SC_MonSs) 1 Disable Enable 1 2 5 (OC_Mon) 2 Disable Enable (Inrush) 100 msec 3 Disable 0.1 ms 1.0 ms 1.0 ms 10 ms 20 ms 4 (Filter_T) 1.0 ms 15 ms 15 ms 100 ms 200 ms 5 (SigExt_T) Enable Val165000 ON 4 ON/OFF (Counter) 5 6 3 Disable 1(EX600-DXPC1EX600-DXNC1) 22 OFF 0.5 mA ()OFF 0.5 mA 3 0.5 mA 31 4x1000 5DeviceNet TM(DeviceNet TM2) -45No.EX-OMN0029CN-D

SMC Wireless System EtherNet/IP ® compatible

Check the occupied bytes of the EX600 I/O unit and valve manifold connected to the remote. (3) Confirm that there is no loose connection units. between the units and connect them correctly. (3)-1 Abnormal digital input unit. (3)-2 Abnormal digital output unit. (3)-3 Abnormal digital input/output unit. (4) Check the part where the error occurs by MS: Red LED flashes. (4) EX600 I/O unit detects

LEC-OM07605CN

DC24V (2) 3.10.2Pr.PC02 ]OFF (Tb) 3 29 3. 3.10.2 (1) [Pr. PA04]2 _ _ _() (a)ON ()ON/OFF ONOFF,Tb[ms] Tb 1.5 0 r/min (95 ms) Tb ON OFF (95 ms) MBR ( ) (1) ON MBR (1) OFF ON ON () () OFF ON () Ready ON () OFF (3) (3) () () 0 r/min +(2) + (2) 1. ON OFF 2. 14 3. 3 30 3.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Delay time selection Select from 1.5 ms or less 20 ms 100 ms 500 ms 1000 ms 2000 ms 5000 ms Display color selection Select from ON Green/OFF Red (OUT1 or OUT2) ON Red /OFF Green (OUT1 or OUT2) Normally Red /Normally Green Setting Complete Setting Complete Setting Complete * For 1 output 2 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Improved Operability

EXxx-OMZ0016

Change the operation mode of the Base or the number of inputs/outputs mapped to the wireless system (Base and Remotes). (3) Network setting error (4) Number of registered Remotes Red Flashing (3) This is a CC-Link station number 3 MS setting error (factory preset).

2

Metal parts material Metric size Inch size Applicable tubing material Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 3 Gasket seal M5 x 0.8 1 3 10-32UNF 3 1/8 2 3 3 1/4 Sealant 2 R 1/4 NPT 3 Brass/ Nylon (Series T, TIA) 3/8 Steel wire 3 Stainless 1/2 4 steel Soft nylon (Series TS, TISA) 3 1/8 2 3 Polyurethane (Series T, TIUB) 1/4 Face seal 1/4 G 1 3

High-Precision Digital Pressure Switch

Delay time selection Select from 1.5 ms or less 20 ms 100 ms 500 ms 1000 ms 2000 ms 5000 ms Display color selection Select from ON Green/OFF Red (OUT1 or OUT2) ON Red /OFF Green (OUT1 or OUT2) Normally Red /Normally Green Setting Complete Setting Complete Setting Complete * For 1 output 2 High-Precision Digital Pressure Switch ZSE20m(F)/ISE20m Series 3-Screen Display Improved Operability

EXxx-OMO0027

User setup Object Dictionary Index Base Type Value Text 0 0.1 ms 1 1 ms 0800 USINT 2 10 ms 3 20 ms 0 1 ms 1 15 ms 0801 USINT 2 100 ms 3 200 ms 0 Offset binary 1 Sign & magnitude 0802 USINT 2 2's complement 3 Scaled 0 None 1 2 value average 0803 USINT 2 4 value average 3 8 value average 0 -10+10 V 1 -5+5 V 2 -20+20 mA 3 010 V 0804 USINT 4 05 V 5 15 V 6 020 mA 7 420 mA 0 010 V 1 05 V 0805 USINT

OMR0032

= 300 [pulses] Travel speed: 60 (30 10-3) = 2000 [pulses/s) Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] [Calculation example: Target position 2] Travel distance: 6 (30 10-6) = 200 [pulses] (in the reverse direction) Travel speed: 60 (30 10-3) = 2000 [pulses/s] Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] 61 - Step Data

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

SMC Wireless System PROFINET compatible

Check the occupied bytes of the EX600 I/O unit and valve manifold connected to the remote. (3) Confirm that there is no loose connection units. between the units and connect them correctly. (3)-1 Abnormal digital input unit. (3)-2 Abnormal digital output unit. (3)-3 Abnormal digital input/output unit. (4) Check the part where the error occurs by MS: Red LED flashes. (4) EX600 I/O unit detects

Fieldbus system EtherNet/IP TM compatible SI unit

1=1.0 ms 2=10 ms 3=20 ms 6Ah Get/Set Input filtering time Digital input, I/O USINT 0=1.0 ms 1=15 ms 2=100 ms 3=200 ms Digital input extension time 6Bh Get/Set USINT Digital input, I/O 0=Offset binary 1=Sign and Magnitude 2=2s complement 3=Scaled (Scaled cannot be set for analogue input) Analogue data format 6Ch Get/Set Analogue input, USINT output, I/O Monitoring the power supply voltage

Fieldbus system EtherNet/IP TM compatible SI Unit

1: 1.0 ms 2: 10 ms 3: 20 ms Input filtering time 6Ah USINT Digital input, I/O 0: 1.0 ms 1: 15 ms 2: 100 ms 3: 200 ms Input extension time 6Bh USINT Digital input, I/O 0: Offset binary 1: Sign and Magnitude 2: 2s complement 3: Scaled (Scaled cannot be set for analogue input) Analogue data format 6Ch USINT Analogue input, output, I/O Power supply for control and input voltage monitor BOOL

EXxx-OMS0026CN

Enable 1 Disable Enable 1 2 2 Disable Enable 100 msec 3 Disable 0.1 ms 1.0 ms 4 1.0 ms 10 ms 20 ms 1.0 ms 15 ms 5 15 ms 100 ms 200 ms Enable Val165000 4 ON/OFF ON/OFF 6 3 Disable ON/OFF 0 83 ON/OFF 7 1(EX600-DXPC1EX600-DXNC1) 22 OFF 0.5 mA ()OFF 0.5 mA 3 OFF 0.5 mA 3 4x1000 -45No.EX-OMS0026CN No.

1

3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

KQ2

16 3 16 5 32 1 4 3.5 16.5 3 16 1 4 5 16 4.6 17 1 4 3 8 K 3 8 6 18.5 5 16 1 2 Applicable tubing M 7 21 1 2 3 8 Note) D: Max. diameter H KK D MS Cross: KQ2TW Applicable tubing O.D.