MY1 3 e w !6 r !9 Note) With top cover removed !
o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve
R R O1-Thread 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 300(3") 400(4") #4-40UNC 0.34 #6-32UNC 0.34 #6-32UNC 0.50 #10-24UNC 0.50 #10-24UNC 0.53 1/4-20UNC 0.65 1/4-20UNC 0.69 5/16-18UNC 0.84 Note) Fully threaded tap for 012 stroke Screw clearance hole front mount/NC(D)Q8WE 4-E Symbol Bore E B 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 300(3")
Contents No. q w e r t y u i o !0 !1 !2 !3 !
Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.
124 M14 x 2.0 28 11 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 150 st or less Over 150 st 150 st or less Over 150 st 80 146.5 193 30 0 46.5 100 166 203 36 0 37 150 st or less Over 150 st 150 st or less Over 150 st 80 160 193 25 13.5 46.5 100 180 203 30 14 37 End
e q w r e q w SQ2130 SQ2131 (A) (B) (A) (B) 2 4 2 4 5 1 3 5 1 3 (P)(R2) (R1) (P)(R2) (R1) Double (latching): SQ2230 Double (latching): SQ2231 t e q w t e q w SQ2230 SQ2231 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(
suppressor (Non-polar type) Vacuum switch None With vacuum switch Nil E Silencer Types R and U are DC only.
How to Order w e r q t y u i o !
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use
3 r !5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !
Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.
There are no flats on the E type 150 bore rear tang. Note 2) FF dimension for NCMC 150 is not applicable. There are no threads on the C type 150 bore rear tang.
8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !
: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2
WB Standard stroke (mm) Bore size (mm) Q R S T U VA VB X YY YL Z 50, 75st 200st 100 to 175st 50, 75st 200st 100 124 100 to 175st 52 64 174 210 75 90 140 166 M12 x 1.75 M14 x 2.0 24 28 28 11 198 236 52 72 128 148 200 220 54 47 92 85 128 121 156 188 180 210 80 100 50, 75, 100, 125, 150, 175, 200 MGPM (slide bearing)/Dimensions A, DB, E MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E DB