MY1

WX S R D Bottom side (ZZ) piping (applicable O-ring) Y 2-d (Machine the mounting side to the dimensions below.)

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80 12 to 25 32 to 100 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NTL D-F7BAL 12 to 25 32 to 100 D-A73C D-A80C D-J79C 12 to 25 32 to 100 D-A79W D-F7WV D-F7V D-F7BAVL 32 to 100 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 7-6-22 23 Compact Cylinder with Auto Switch: Standard Type Double Acting, Single Rod Series CDQ2 Operating Range 180 200 Bore size (mm) Auto switch model

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

V

F S TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

Z 50 100 150 200 300 400 500 3.02 3.31 3.56 4.04 3.02 3.23 3.52 4.00 3.04 3.25 3.54 4.02 4.44 5.06 5.83 D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D R O D S I D E F L A N G E T Y P E NCJ2F_-_T S Z T H MM NN NA NB 50 100 150 200 300 400 500 50 100 150 200 300 400 500 Bore Size* A B C D F GA FC FT FX FY FZ 0.12 1.10 No5-40UNC 1/4-28UNF 0.63 0.12

Table of Contents

D. Applicable tube O. D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P

15

E C x 200 (= D) 20 Note) When mounting the actuator using the body mounting reference plane, use a pin.

JXCx-OMT0023

command Program end 500[r/min] 200[ms] 300[ms] 500[10STMm] 1000[r/min] 500[ms] 1000[10STMm] 1500[r/min] 100[ms] 0[10STMm] a) b) c) d) e) f) g) h) i) j) Ignored.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

E C x 200 (= D) 25 Note 1) Distance within which the table can move when it returns to origin.

Series SV

(S, R, RS) P PG PH 1 2 U D B (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Slide Unit Series CX2/CXWM/CXWL

# # ( ) Hw Ht Hv D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C !# $% ! !% ! # " Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 16 Basic Type: CXWM16Stroke/50 to 200 Max.

Slide Unit Series CX2/CXWM/CXWL

# # ( ) Hw Ht Hv D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C !# $% ! !% ! # " Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 16 Basic Type: CXWM16Stroke/50 to 200 Max.

24

With head end lock D-M9 D-M9V D-M9W D-M9WV D-Z7 D-Z80 D-Y59 D-Y69 D-M9A D-M9AV D-A9 D-A9V D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch Auto Switch Proper Mounting Position [mm] *1 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-Y7BA *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW Bore size A B A B A B A B A B 20 9 38 5 34 4 33 25 9.5 38 5.5 34 4.5

smcmaintenancepartslist

Pressure Control Equipment D B K P C C C K U P O S A A H L C to U S O H L to B D !0 o D-D C-C B-B A-A !0 o !1 !1 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters y y q IN OUT IN OUT u r t u r t i i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 67 Standard Motor Horizontal Mount Motor Output 200 W Ground Ball Screw 15 mm/10 mm lead Series LTF8 How to Order 300 LTF8 R R 2 A1 PH S3 Photo micro switch Nil Without switch/mounting rail 1 2 3 4 5 6 NPN 1pc. NPN 2pcs. NPN 3pcs. IO connector Stroke (mm) Refer to the standard stroke. Motor type S3 S7 Nil None AC servo motor (Incremental encoder) 200 W PNP 1pc.

SV

B (S, R, RS) (-D) Stations When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Basic type / Direct mount type Series CY3B/CY3R

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A9 D-M9 D-M9W D-A9 D-M9 D-M9W D-M9 D-M9W D-A9 D-M9 D-M9W D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5 21.5 107.5 103.5 108.5 45.5 41.5 46.5 84.5 88.5 83.5

LJ1H

Detector CN2 L11 L21 LECSB2For three phase 200 VAC For single phase 200 VAC CNP1 NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC