Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Compact Hydraulic Cylinder

100 75 28 32 22 20 26 14 29 M22 x 1.5 35 90 100 34 80 13 80 234 14 90 139 M27 x 2 M12 x 1.75 38 6.5 118 118 90 35.5 35 27 19 27 14 34 35 100 125 34 80 15 100 250 16 112 170 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 27 19 27 16 34 35 100 160 43 100 17 110 279 18 140 197 M16 x 2 M33 x 2 42 9 174 174 140 45 38 36 22 28 18 38 40 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114

SYJ3000/5000/7000

SUP spacer assembly Body ported A, B port P port -+ -+ R R P R port P Base mounted P port Type 32P Individual EXH spacer assembly R port A, B port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D E R NVFS2000 NVFS 2 F 00 P O R T S I Z E P O S I T I O N Without Subplate 01T 1/8 NPTF 02T 1/4 NPTF * Bottom Ported 1/8 NPTF Only 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center 6 3 Position Perfect P O R T I N G Side *B Bottom Note) *1/8 NPTF Only B O D Y T Y P E 0 Plug-In Type M A N U A L O V E R R I D E P I L

Metal Seal/Rubber Seal Series VQ Body Ported

(One label for each) D side U side SUP/EXH block bush assembly SUP Block bush assembly 5(R1) 1(P) 3(R2) D side U side R1 P R2 VVQ1000-87A-B-50 Shut off label 7.8 ~ =6.5 2(B) 4(A) 2(B) 4(A) When ordering a block bush incorporated with the manifold, a block indication label is attached to the manifold. 2.8 10.5 R P R R P R R P R SUP passage blocked EXH passage blocked SUP/EXH passage

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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

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MR-C10A Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ13 100 200/230 R MR-C10A1 100/115 With brake (Vertical specification) HC-PQ13B 100 MR-C10A 200/230 100/115 SGME-01BF12 SGDE-01BP SGDE-01AP Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 100 200/230 SGME-01AF12 Y SGDE-01BP SGDE-01AP 100/115 200

5-Port Solenoid Valve

e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 3-position

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Battery-less

LEFS16(L/R)/Ball Screw Drive Horizontal Vertical 16 6 Lead 5: LEFS16(L/R)EB 14 12 Lead 5: LEFS16(L/R)EB Work load: W [kg] Work load: W [kg] 4 10 Lead 10: LEFS16(L/R)EA 8 Lead 10: LEFS16(L/R)EA 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 800 600 700 Speed: V [mm/s] Speed: V [mm/s] LEFS25(L/R)/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEFS25(L/R)EB Lead 6: LEFS25(L/

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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 to 1 MPa 0 to 101 kPa 100 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa 101 to 101 kPa 0 to 101 kPa 100 to 100 kPa Set pressure range 12 to 24 VDC (Ripple p-p 10% or less) Voltage 2% F.S. or less (0 to 50C: based on 25C) 3% F.S. or less

Table of Contents

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

SYJ300/500/700

+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

Hydraulic

125 100 261 100 35 123 284 160 108 290 120 38 131 313 92 Series CHA Dimensions Foot type: CHAL H 2-Rc P A MA K F GA T a M GB V Cushion adjustment screw Air release 4-J R (max.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

Compact 5-Port Solenoid Valve

w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Plug-in type Non plug-in type VVFS2000-R-01-1 VVFS2000-R-01-2 VVFS2000-R-02-1 VVFS2000-R-02-2 Body type Plug-in type Non plug-in type ARBF2000-00-P-1 ARBF2000-00-P-2 P port regulation 1 8 Rc 1 4 Rc For details, refer to page 1247.

Proposals for Energy Saving

-8 KNS-10-100-4 2 H2 H1 L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 14 14 14 14 14 14 14 KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-

Table of Contents

R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.) R 3/8 x 100 M16 x l 250 M16 x l 300 M24 x l 500 M16 x l 500 Anchor bolt (4 pcs.) Note 1) Manufactured upon receipt of order Note 2) The accessories should be mounted by user.