ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

MGP

0 r @4 e o t w @7 !0 y CL 16: 25 stroke 20, 25: Under 75 stroke MLGC !8 CNA !3 16: Over 50 stroke CB 25 stroke CV/MVG 20, 25: Over 100 stroke @1 @0 @2 20, 25: Over 50 stroke CXW CXS Cushion valve section CXT MGPM32 to 100 MGPL32 to 100 MX @5 i !6 !5 u q !4 !2 @3 !9 !1 !7 MXU @6 !0 t @4 @7 @5 @8 !0 MXS MXQ 32 to 63: 50/75 stroke 80, 100: Over 50 stroke Over 50 stroke y w o r e MXF !8 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Without auto switch A B P With auto switch A B P Bore size (mm) 5 st 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to 100 10 to 100 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to 100 5 to 100 st 44.5 + Stroke 30.5 + Stroke 54.5 + Stroke 40.5 + Stroke 129.5 154.5 115.5 140.5 Rc 1/8 129.5 154.5 115.5 140.5 32 M5 x 0.8 Rc 1/8 54 + Stroke 40 + Stroke 64

VQZ1000/2000/3000

required) DIN terminal (YZ) DIN terminal (Y) 1 (P) 5 (R) Except VQZ1000 ) ( VQZ2000 N.C. 1.4 1.6 (B) 2 1 (P) 3 (R) Except VQZ1000) ( N.O.

Secondary Batteries

(mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D. (mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

JIS Standard Hydraulic Cylinder

3 @3 r @5 !

4/5 Port Solenoid Valve

port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

0.55

13 0.5 52.5 36.5 75 33 165.9 168.3 R P R R P R 23 23 149.9 152.3 66 36.5 (23.8) 24 76.2 1/4 [1 (P), 5 (R), 3 (R) port] 1.7 Manual override (Pitch) 4 x 5.5 (For mounting) 46.8 (Lead wire length) (Lead wire length) P = 27.5 28 G: Approx. 300 H: Approx. 600 G: Approx. 300 H: Approx. 600 (Station n) (Station 1) (Indicator light) + + + + + 75.5 52.5 30 2.2 (PE port) L-type plug connector (L) 1

Membrane Air Dryer

Dew point indicator kit IDG-DP01-X001 (Option: PS) IDG-DP01-X001 (Option: P) 10 With O-ring (1 pc.) 10 Series IDGP) r w i Purge air for dehumidification Purge air for dehumidification y IDG60<, 75<, 100< IDG6075

MGP

indicator) P. 69 Y7BA 2 wire P. 62 Note 3) Magnetic field resistant (2 color indicator) P. 70 P5DW P. 63 Note 1) Lead wire symbols 0.5m .

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

MG

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

CA2

side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 Different sides With n D-A44 Same side 10 20 100 75 80 90 75 80 90 100 100 100 1 Different sides

AC Servo Motor Driver (Pulse input type/Positioning type ）

Function and application I/O mode division P S T Zero speed detection ZSP CN1-23 ZSP turns on when the servo motor speed is zero speed (50 r/min) or less. Zero speed can be changed with [Pr. PC17]. DO1 OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC17] Servo motor speed 0 r/min [Pr.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH spacer) 300 (PE port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

0.4

r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1