Rotary Table/Rack & Pinion Style Series MSQ

MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

Compact Rotary Actuator Series CRQ2

150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

Guide Cylinder/Compact Type Series MGC

AI RLQ AM W Cutout window MLU View A-A' MLGP Mounting dimensions Standard Stroke ML1C (mm) A AA AB AG AH AI AJ AK AL AM AN AO AP B BP Note 3) BZ GC GD GK Bore size (mm) 20 25 32 40 Stroke range (mm) 75, 100, 125, 150, 200 94 12 13 134 150 92 108 9 9 75 140 M8 32 135 1/8 73.5 28 54 3.5 104 16 16 160 176 110 125 9 9 88 165 M8 37 160 1/8 86.5 29 62 4 75, 100, 125 150, 200, 250 300 104 16 16

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Sine Rodless Cylinder Series REA/REB

Bore size (mm) Maximum manufacturable Maximum stroke with switch Standard stroke (mm) stroke (mm) stroke (mm) Symbol Specifications 500 500 150, 200, 250, 300 10 XC57 With floating joint 150, 200, 250, 300, 350, 400 450, 500 15 750 1000 20 1000 1500 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 1500 2000 32 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 2000 1500 Note)

Air Slide Table/Long Stroke Type Series MXY

Nil 6 50, 100, 150, 200 1 pc.

Plate Cylinder

Optimum operating position D-M9A(V) D-M9W(V) Series Variations Standard stroke (mm) Rod end configuration Action Type Size 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Single rod 25 32 Double acting 40 Double rod 50 Male thread, Female thread 63 Spring return, Spring extend 25 32 Single acting 40 50 63 Features 1 Series MU Rod End Allowable Load Y axis X axis In case of a plate

Air Cylinder

Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)

Stroke Reading Cylinder and Counter

175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Cylinder with Lock

Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) Minimum mountable stroke for a cylinder with auto switch(es) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Caution Intermediate strokes other than the above are produced

Mechanically Jointed Rodless Cylinder Series MY2

Wn Mass mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88 kg 65 mm 0 mm 5 mm 111 Wb 4.35 kg 150 mm 0 mm 42.5 mm Y 210 Y Wc 0.795 kg 150 mm 111 mm 42.5 mm Wd 1.5 kg 150 mm 210 mm 42.5 mm n = a, b, c, d 3 Composite Center of Gravity Calculation m3 = mn = 0.88 + 4.35 + 0.795 + 1.5 = 7.525 kg m3 1 X = x (mn x xn) 7.525 1 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.5 x 150) = 140.1 mm m3 1 Y = x

Precautions 1

151 to 200 201 to 300 101 to 150 151 to 200 201 to 300 20 25 32 40 81 93 106 131 25 37.5 50 75 23.5 10.5 12.5 36 30 68 18 85 97 110 135 25 37.5 50 75 23.5 10.5 12.5 36 32 72 18 85 97 110 135 25 37.5 50 75 23.5 10.5 36 12.5 32 72 18 102 27 46 90 115 140 25 37.5 50 75 10.5 12.5 41 77 20 D(mm) ZZ Bore size (mm) -X 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 143 156 168 181

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

Compact Cylinder

Weights Unit: g D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch part no.

Compact Cylinder with Solenoid Valve/

Weight (g) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model Auto Switch Internal Circuit 8 8 7 0.5 D-M9NW(V) 14 14 13 1 Lead wire length (m) 41 41 38 3 DC (+) Brown 68 68 63 5 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black (mm) Dimensions D-M9W M2.5 x 4 l DC () Blue Slotted set screw Indicator light D-M9PW(V) 2.6 DC (+) Brown 2.7 2.8 4 22 OUT Black 3.2 DC ()

180° Angular Style Air Gripper Series MHY2/MHW2

Series MHY2/MHW2 180 Angular Style Air Gripper Cam Style / Rack & Pinion Style MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D655 180 Angular Style Air Gripper Cam Style Rack & Pinion Style Series MHY2/MHW2 Series MHY2/Cam Style Light and compact size in small bore sizes Over length L (mm) Gripping moment Bore size (mm) Model Mass (g) (Nm) L MHY2-10D 10 0.16 70 71 MHY2-16D 16 150 0.54

Mechanically Jointed Rodless Cylinders

32 50 MY3A MY3B MY1B 37 45 54 67 84 27 32 27 32 37 45 54 67 84 MY1B/MY1M (with air cushion) 37 54 84 116 46 68 94 40 54 84 130 MY3M MY1M 33 45 63 93 Weight reduced by 55% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (kg) (mm) Series 16 20 25 32 40 50 63 Series 16 20 25 32 40 50 63 MY3A MY3B MY1B 0.34 0.57 0.99 1.61 2.95 4.52 8.26 MY3A MY3B MY3M MY1B MY1M 110 128 150

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W/ m60 B 10 600 460 370 300 250 210 180 150

Possible to transfer a workpiece at low-speed.

150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !