Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 KS K S T V KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 61 76 76 99 L1 41.5 55 55 72.5 L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L3 43 57 57 75 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 57 74 74 95 L2 61 76 76 99 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57

1

55 65 80 65 75 90 25 11 61 10 51 10 11 56 61 71 66 71 81 61 71 86 71 81 96 32 13 12 65 55 12 13 60 65 75 70 75 85 65 75 90 75 85 100 Dimensions except mentioned above are the same as standard type. 6-17-90 72 Made to Order Common Specifications: -XC35: With Coil Scraper Symbol -XC35 34 With Coil Scraper It gets rid of frost, ice, weld spatter, cutting chips adhered to the piston rod, and

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Smooth Cylinder/Low Speed Cylinder

CDQ2YB325 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB405 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB5010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB6310 15 20 25 30 35 40 45 50 75 -100 CDQ2YB8010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB10010 15 20 25 30 35 40 45 50 75 -100 CQ-M8 x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L CQ-M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L

Modular F.R.L. Unit

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Battery-less

0 w e r t q y u i o LES R E J 30 25 R1 CD17T For details on controllers, refer to the next page. 25 w Motor mounting position e Motor type r Lead [mm] q Size J 16 K 8 E Battery-less absolute (Step motor 24 VDC) Basic type/R type Cable Motor R y Motor option t Stroke [mm] Nil Without option B With lock Stroke Applicable stroke 30 to 150 301, 50, 75, 100, 125, 150 Table Symmetrical type/ L

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

ZP

92.6 50 192.6 112.6 75 50 40 60.6 42.8 32 4 10 M14 19 4 12 12 M8 x 06 08 A14 10 141.6 73.6 x 1 1.25 61.6 43.8 33 50 20 138.6 83.6 30 148.6 93.6 50 193.6 113.6 75 50 Dimensions Per Vacuum Inlet Model Q R S Fitting part min. hole size Vacuum inlet direction q Pad dia.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

MG

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

SY

for AC < >: Values with surge voltage suppressor Series SY3000 Dimensions 2 position double Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Standard stroke (mm) Model 100 75 50 40 30 20 10 CXSM6-R CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R 0.105 0.105 0.18 0.18 0.3 0.32 0.465 0.485 0.72 0.73 1.33 1.35 0.12 0.12 0.2 0.2 0.33 0.35 0.5 0.52 0.76 0.77 1.43 1.45 0.135 0.135 0.225 0.225 0.355 0.375 0.54 0.56 0.8 0.81 1.53 1.55 0.15 0.15 0.25 0.25 0.38 0.4 0.58 0.60 0.84 0.85 1.62

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Table of Contents

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

JIS Standard Hydraulic Cylinder

3 @3 r @5 !