High Vacuum Angle Valve

air (Bellows balance) 2 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 50mm, Thread: TN (NPT), Stroke: 600mm

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 50mm, Thread: TN (NPT), Stroke: 500mm

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 50mm, Thread: TN (NPT), Stroke: 100mm

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 50mm, Thread: TN (NPT), Stroke: 175mm

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 50mm, Thread: TN (NPT), Stroke: 125mm

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 50mm, Thread: NPT, Stroke: 500mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 50mm, Thread: NPT, Stroke: 100mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 50mm, Thread: NPT, Stroke: 175mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 50mm, Thread: NPT, Stroke: 125mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

XMC/XYC Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80

XMA/XYA Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00

XMD/XYD Series

) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5

XMH/XYH Series

),CF KF(NW) KF(NW),CF KF(NW) Flange type XYH KF(NW) KF(NW) KF(NW) Main material Body: SCS13 (SUS304), Bellows: SUS316L,, Main part: SUS304 and FKM (standard sealing material) Operation torque 0.1 or more 0.15 or more 0.35 or more 0.5 or more Number of handle rotations 5 7 10 13 XMH 0.31 (0.35) 0.57 1.35 (1.71) 2.02 Mass kg Note 4 XYH 0.62 1.37 2.42 Note1) XYH-16 is not available.

Mechanically Jointed Rodless Cylinder Series MY2

Z + Stroke (mm) LB 72.4 108.7 135.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 MW 64.6 97.5 121.5 C 3.3 5.4 8.6 M 7 9 13 B 6.5 9.5 14 L 80 110.8 180 LW 104 158 214 A 80 105 165 LC 6 7 7 (LL) 40 49.6 75 LD 3.4 5.5 9 LE 5 5 5 MM M4 x 0.7 M5 x 0.8 M6 x 1 N 20 25 40 NT 3.5 5.3 6.5 NH 2 3 4 NE 27 35.5 56.5 NC 14 21.3 32.4 Model MY2C16G MY2C25G MY2C40G NW

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

MY1

O-ring) Y 2 x 4 A B 6.0 C 3.5 CH 25 G 13.5 GA 8.5 GB 16.2 H 52 HH 27.7 J K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6.0 MM N 20 NC 14 NE 49.5 NH 16.5 Bore size (mm) 16 20 090 M5 x 0.8 M4 x 0.7 110 7.5 4.5 26 12.5 12.5 20.0 58 33.7 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 21.7 NW PA PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 16 20 07.5 11.5 56 60 40 50 94 100 3.5 4.5

Mechanically Jointed Rodless Cylinders

Standard Type: 16, 20, 25, 32, 40, 50, 63 MY3B Bore size Stroke G G NG NG 2 x P (Hexagon socket head plug) 4 x MM depth M Cushion needle LD through hole 4 x B counterbore depth C NH H (LL) PA L 2 x 2 x P PE YW (Hexagon socket head plug) QW NW LW UU TT PB PF PG HG Q + Stroke Floating bracket mounting thread Port variation (2 x JJ counterbore, thread depth from bottom KK) Head cover piping