Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

XLA Series

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

XLF Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

High Vacuum L Type Valve

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLG Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. The heaters are PTC thermistor type design.

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: TN (NPT), Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: TN (NPT), Stroke: 300mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket)

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 2) for 0.5MPa 46 102 400 300 510 1070 Port size M5 Rc 1/8 Weight kg 0.27 0.45 1.0 1.4 2.4 3.9 Note 1) Conductance is molecular

XLDV Series

x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3) for 0.5MPa 46 102 400 300 510 1070 Port size M5 Rc 1/8 Weight kg 0.26 0.44 1.0 1.5 2.4 4.1 Note 1) Conductance is molecular flow

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Ordering Example of Cylinder Assembly Double clevis Cylinder model: CDJ2YD16-60Z-NW-M9BW-B Double knuckle joint Mounting D: Double clevis Pivot bracket N: Yes Rod end bracket W: Double knuckle joint Auto switch D-M9BW: 2 pcs.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Ordering Example of Cylinder Assembly Double clevis Cylinder model: CDJ2YD16-60Z-NW-M9BW-B Double knuckle joint Mounting D: Double clevis Pivot bracket N: Yes Rod end bracket W: Double knuckle joint Auto switch D-M9BW: 2 pcs.

AC Servo Motor Driver (SSCNET /H Type)

Load DOCOM (Note) 24 V DC 10% 300 mA Note. If the voltage drop (maximum of 2.6 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. -12- 4. Axis No. settings Set the control axis No. with the rotary switch.

NVZseies

/NVr'i|Zt-01-(OM) crommevNw4zl -20-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.