ZP

8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 13.5 15.5 5 7 1.8 2.5 ZP N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5

VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Free Mount Cylinder Series CU

Applicable bore size (mm) d H1 B1 C1 MU 4 x T counterbore 6 10 16 20 25 32 M3 x 0.5 1.8 5.5 6.4 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 Auto switch M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 (mm) Bore size (mm) A P R T A' B C D E GA GB H J K L MM NN Q QA 6 10 16 20 25 32 3.2 3.2 4.5 5.5 5.5 6.6 7 9 12 16 20 24 6 depth 4.8 6 depth 5

NCQ8

Q Z 4 places C-depth D-rod dia.

Slide Tables MX Series

N347 Slide Tables MXH, MXS, MXQ, MXF, MXW, MXP MX Series Integrated Cylinder and Guide Bearing 6 Styles Multiple Mounting and Porting Configurations Bore Sizes from 6mm to 25mm Wide Range of Options Q Q Table of Contents Q Q Q MX Series Features .pages 4-5 Q Safety Instructions . pages 6-22 MXH .pages 9-11 MXS.pages 12-14 MXQ.pages 15-17 MXF .page 18 MXW.page 19 MXP.pages 20-21

Free Mount Cylinder

6 Seal kit includes !4, !5, !6.

Air Slide Table Series MXP

6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

HRL

Select the proper size of cable according to an actual condition. 5 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Operation Display Panel Items displayed on the home screen and setting items are shown in List of check items in inspection monitor menu. w q e r o !0 !1 !2 !3 !4 t y u i !5 !6 !7 !8 !

REA/REB

9 @1 q !5 !4 y i !0 !6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

Air Cylinder

5/64 3 3/4 1.57 3/8-24 1.18 1 4 11/16 2.76 1/2 5/8 2 1-14 1 5/8 1 1/4 6 1/4 4 1/4 4.7 1 5/8 2.59 2.72 400 (4") 1 3/8 7/16 5/8 0 1 1/2 6 5/64 4 1/2 1.57 3/8-24 1.18 1 5 7/16 3.32 1/2 5/8 33 Series NCA1 Medium Duty Air Cylinder Oversized Rod Rear Flange Mounting Type NC A1G (XB5) Y P + Stroke AA FA 4-FB (Hole) C 2-EE (NPTF) D Across Flats KK Q Width Across Flats KK Bore 200 250 325 400 Q 3

CY1

8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

MGP

6 XAH7 depth 6 GA PB Q 2-P (plug) PA + Stroke GB J K S FB FA C + Stroke B + Stroke E A + Stroke G Note 1) Refer to "Manufacture of Intermediate Strokes" on page 19 for intermediate strokes.

Compact Rotary Actuator Series CRQ2

2 u t e o @3 @1 @4 @0 @6 @0 CRA1 CRQ2 q w r y !5 i MSQ q w r y !5 !6 i MSZ CRQ2X MSQX MRQ With cushion Size 20/30/40 With auto switch and cushion Size 20/30/40 !3 !0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

CA2

Data 6-8-43 44 Series CBA2 Construction Head side end lock @1 @2 !6 !7!8 !9 @9 #0 #1 #2 #3 #4 #5 #6 !3 e r t y u q !4 !5 w !2 @0 @8 o !0 !

MY1

6 7 12 12 15 15 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FW 66 80 91 FH 13 16 17.5 FC 14 14 13 17 17 26 31 FB 54 67 78 F 4 4 6 6 6 6 6 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57 66 77 EA 7 10 12 14 17 20 26 E 14.6 20 24 29 35 40 52 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Shock absorber model RB0806 RB0806

CRB2/CRBU2/CRB1

Following illustrations show the intermediate rotation position when A or B port is pressurized. 3 mounting holes depicted with the marks are for tightening the actuator and not to be used for external mounting. 3-M3 x 0.5 with depth 6 3-Q (CRB2BWU10) 6-Q (CRB2BWU15, 20, 30) including A port B port A port B port Double vane type CRB2BWU15, 20, 30-D Dimensions for double vane type sizes

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

KP/KPQ/KPG

T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !

Refrigerated Air Dryers

*1 Values obtained from Correction Factors on page 6. 3 Check the coefficient.