Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: KZ (Plug Connector, 300mm)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 600mm, CE Compliant: -

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series D 10-SY3000 SY3000-52-6A A 10-SY5000 SY5000-52-4A L Dimensions 10-SY7000 SY7000-70-2A EXH block disc Model A L D 16 18 20.5 22 24 16 18 20.5 22 Applicable fitting size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-10 10-KQP-12 10-KQP-03 10-KQP-07 10-KQP-09 10-KQP-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 By installing an EXH block disk in

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

AC Servo Motor Driver (Network card type ）

20 40 70 100 200 Bend radius [mm] 10 7 10.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Free Mount Cylinder Series CU

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

Magnetically Coupled Rodless Cylinder

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Air Cylinder Series CM2

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

ZP

Thin flat Thin flat with ribs Table (2) Pad Diameter/Stroke Diameter (mm) Thin flat/Thin flat with ribs Stroke(mm) 2 8 3.5 x 7 4 x 10 4 6 10 13 16 20 25 32 40 50 2 x 4 13 16 10 6 10 15 20 25 30 50 40 Table (3) Vacuum Entry/Mounting Thread Diameter 2 to 8 2 x 4, 3.5 x 7, 4 x 10 Thin section series 10 to 16 10 to 32 40, 50 Symbol Thread dia.