Symbol: Body Ported, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 1000mm; Light/Surge: No, CE Compliant: CE Compliant

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket), Lead Wire Length: 6 (Grommet, 600mm; Light/Surge: No)

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket), Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket), Lead Wire Length: KZ (Plug Connector, 300mm; Light/Surge: Yes)

Symbol: Body Ported, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Bracket: Bracket, Lead Wire Length: Plug Connector, 300mm; Light/Surge: Yes, CE Compliant: -

Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: Bracket, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: Bracket, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Safety Instructions

Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®)

: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 24 V DC, Option: None, Power Consumption(W): Inrush: 2.5 / Holding: 1,

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 10-SY3000 SY3000-38-20A 10-SY5000 SY5000-38-1 A 10-SY7000 SY7000-38-1 A EXH port (Both sides) E5 5 10-SY3000 SY3000-39-20A 10-SY5000 SY5000-39-1 A 10-SY7000 SY7000-39-1 A 1 8 1 4 10-SY9000 SY9000-39-1 A 1 4 1 8 1 4 10-SY9000 SY9000-38-1 A 1 4 P1 1 SUP port Note) In case of types 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA

Table of Contents

10 16 10 17 24 14 19 25 20 22 20 22.5 20.5 23 21.5 23.5 24.5 22.5 24.5 25.5 21 1 8 17.5 2.5 15.5 10 9.6 1 4 1 8 2-Applicable tubing 21.5 5 32 18 3 16 10.4 10 1 4 1 8 1 4 22.5 22.5 24 24.5 25 26 26.5 27 3 16 19.5 3.5 11.4 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 Connection thread 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 46 27 24 31 30 29.5 30 27 26.5 1 4 17.46 3 8 1 2 3 8 17.9 25.5 7 21 17

AC Servo Motor Driver (Network card type ）

: +8 V/800 V) _ _ 0 E Speed command 2 (8 V/max. speed) _ _ 1 0 Load-side droop pulses (10 V/100 pulses) (Note 2) _ _ 1 1 Load-side droop pulses (10 V/1000 pulses) (Note 2) _ _ 1 2 Load-side droop pulses (10 V/10 pulses) (Note 2) _ _ 1 3 Load-side droop pulses (10 V/10 pulses) (Note 2) _ _ 1 4 Load-side droop pulses (10 V/1 Mpulses) (Note 2) _ _ 1 5 Servo motor-side/load-side position deviation

AC Servo Motor Driver (Pulse input type/Positioning type ）

frame 10 A 20 Note 1.

Electric Actuators

LJ1 LG1 LC1 LX LC6D/LC6C Switches LC6C Power Connector Cable LC6D Connector Cable Model LC6-1-C2--X252 Model LC6-1-C1--X258 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17

ZP

32 40, 50 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, Rc M5 x 0.8, M6 x 1, M8 x 1.25, Rc M6 x 1, M8 x 1.25, Rc 1 8 1 8 Mounting Use connection for vacuum entry Pad Type Flat with ribs Deep Bellows Pad form Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad diameter (mm) 10, 13

Magnetically Coupled Rodless Cylinder

6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

Air Cylinder Series CM2

B1 13 17 17 22 CX 10 10 10 15 BC 38 45 45 52 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 BN 80 90 90 GB GC 8 9 9 8 GD 55 64.5 64.5 70 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 D 8 10 12 14 Stroke range 20 25 32 40 1 8 1 8 1 8 1 8 1 8 1 8 1 8 1 8 MNB 20 26 26 32 Up to 300 8 Up to 300 8 CNA Up to 300 8 Up to 300 11 100.5 CNS NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 41 45 45 50 GR 4 7 7 7 H1 5 6 6 8 I

SY

SS5Y71, #1 L type plug connector . SS5Y71, #1 + #10 M type plug connector .