F

4 M5x0.8 KQS04-M5 2 9.8 23 19.5 16 2.7 2.7 6.3 4 1/8 KQS04-01S 3 9.8 23 19 16 4.1 3.6 7.8 6 M5x0.8 KQS06-M5 2 11.8 24 20.5 17 2.7 2.7 8.5 6 1/8 KQS06-01S 4 11.8 24 20 17 10.0 9.9 8.9 6 1/4 KQS06-02S 4 13.8 25 19 17 10.7 10.0 14.8 8 1/8 KQS08-01S 5 14 28 24 18.5 17.2 16.2 12.4 8 1/4 KQS08-02S 6 14 25.5 19.5 18.5 23.3 16.2 11.3 8 3/8 KQS08-03S 6 17 26.5 20 18.5 23.3 16.2 23.8 10 1/8 KQS10-

VZS

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.

AC Servo Motor Driver (Network card type ）

No. 1 No. 3 No. 1 Servo motor speed 100.00 r/min 100.00 r/min 150.00 r/min 4 4 4 5 3 3 3 5 5 2 2 6 Positioning 2 6 6 7 7 7 1 1 1 0 0 0 5. A delay time can be set with [Pr. PT39]. 6.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

338 351 557 (535.5) 10 313 326 532 (510.5) 8 263 276 482 (460.5) 9 288 301 507 (485.5) L1 L2 L3 L3 ( ): Type MP 2-5-43 Series VQ4000 Construction Plug Lead Unit Metal seal type Rubber seal type e q w e q w VQC SQ VQ0 4 (B) 2 4 (B) 2 (A) (A) VQ4151 VQ4150 VQ4 VQ5 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 VQZ e q w e q w VQD 4 (B) 2 4 (B) 2 (A) (A) VQ4250 VQ4251 1 (P) (R1) (R2) 3 5 1 (P) (R1

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max. ON-flow 0.01 /2B, 6 11/2B, 21 0 0 0.2 0.4 0.6 0.8 1.0 Pressure (MPa) 1 2 3 4 5 Flow speed (m/s) Precautions Be sure to read before handling.

Large Flow Air Filter AF800/900 Series

Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

AF800/900

Flow rate (/min (ANR)) 1 4 1 6 8 Rc 1 4 NPT 1 4 G 14-3-13 2 Series AF800/900 Construction Component Parts Material AF800 AF900 No. Description Note Platinum silver painted q Aluminum die-casted Aluminum die-casted Body Platinum silver painted y Aluminum die-casted Aluminum die-casted Housing Replacement Parts Part no. AF800 AF900 11345-5B No.

Manifold Specifications

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.

CG5-S

1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

AF800/900

This symbol "l" indicates the port size. 3 4 1 4 1 2 3 4 5 Rc(PT) 1 8 Rc(PT) 1 8 G(PF) M10 x 1 M10 x 1.5 1.4-12 Series AF800/900 Construction Component Parts Material AF800 AF900 No. Description Note Aluminum die cast Aluminum die cast Aluminum cast Aluminum cast Platinum silver paint Platinum silver paint q Body Housing y Replacement Parts Part No.

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 6 9 6 (b) 1 6.2.3 2 (No.PA080003) 3 ( ) 4 5 6 7 8 7.27.3 9 38 10 (c) (VG2PB09) (Hz) 2 ) (1 1 + X2 (VICPB10) (ms) 20003000 ) /(1 /1+ 6 10 6 (PG2PB08) 8 1 4 1 1 + ) (1 (PG1PB07) () 8 1 4 1 1 + ) (1 6 11 6 6.4 X-Y2 (1) (a) No. PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) No.

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

OMS0020

If returning to origin has already been completed, omit No.1 to No.6 and start from No7.

In-line Air Filter

) 11.2 Applicable tubing O.D. (3.2, 4, 1/8", 5/32") IN 18.2 8.5 33 2 x Mounting hole for M3 countersunk head screw 10 60.5 11.5 17.5 25 18 ZFC5 (4, 6, 5/32", 1/4") 19 Applicable tubing O.D. (4, 6, 5/32", 1/4") IN 33.4 20 30 18 53.9 23 4.5 6.4 15.7 13.6 24.6 6 ZFC Series Dimensions ZFC7 (6, 8, 1/4", 5/16") 23.6 Applicable tubing O.D. (6, 8, 1/4", 5/16") IN 39.8 24 34 20 68.3 27.3 4.5 8.7 19.3

2/3 Port Solenoid Valve for Chemicals

Material Part list/LVM11 Body 1 PEEK Diaphragm assembly 2 EPDM/FKM/Kalrez t Spacer 3 PBT Armature assembly 4 Stainless steel/POM r Coil assembly 5 u y Sleeve 6 Iron Return spring 7 Stainless steel w e Board assembly 8 q !1 Casing 9 PBT Plug 10 NBR O-ring 11 NBR LVM11R LVM12R !2 !2 !0 !0 !1 !1 y y t t u u i i o o !3 !3 r r w w e e q q LVM112 !2 !0 Description No.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

Material Part list/LVM11 Body 1 PEEK Diaphragm assembly 2 EPDM/FKM/Kalrez t Spacer 3 PBT Armature assembly 4 Stainless steel/POM r Coil assembly 5 u y Sleeve 6 Iron Return spring 7 Stainless steel w e Board assembly 8 q !1 Casing 9 PBT Plug 10 NBR O-ring 11 NBR LVM11R LVM12R !2 !2 !0 !0 !1 !1 y y t t u u i i o o !3 !3 r r w w e e q q LVM112 !2 !0 Description No.

Table of Contents

(Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

Symbol: 11 (Body Ported), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket), Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)