Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Station 1) For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R 18 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 39.3 40.1 63.3 79.8 1 P 1 P 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 2-One-touch fitting [1 (P), 3/5 (R) port] [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 + + + + 2n1-One-touch fitting One-touch fitting One-touch fitting

0.4

VP4 MODEL SB RD SD VQ 1/2 VQ 1/2 VQ 4/5 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

0.4

(A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

HRX-OM-X010

Table 5-2 Model Indication screen No. Item Descriptions 1 System model 2 System revision No. 5.3 Operation Screen HRZ Series 5-4 HRX-OM-X010 Chapter 5 System Operation 5.3.2 Status screen 1 1 POWER ON 5a 2 3 4 Figure 5-4 Status screen 1 Table 5-3 Status screen 1 No.

IDX-OM-W022

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W023

IDU15E1 IDU Series 2 2 IDX-OM-W023 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDU8E-1015E1-10100V 100V 30mA 10A IDU8E-2015E1-20200V IDU8E-2315E1-23200V AC200V 30mA 5A IDU Series 2 3 IDX-OM-W023 2 216AWG 3 812 1.25 0.1m 30m M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () IDU Series 2 4 IDX-OM-W023 2 2 3 ()2 2 2-2-3 4 IDU Series

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

IDX-OM-W053

L N PE M3 6.5mm 1.25mm 2 :17 1 2 2 2 , 2 1 IDFA6E 20kg 2 2 2 2 2 1 240 050 ( ) 2000m 600mm 600mm 600mm 600mm 600mm 2 1 2 2 2 2 6 6-2 2 2 3 50 50 2 2 4 10mm ( 2 2 2 2 2 5 6-1 IEC AC200V 30mA 5A 1.25 216AWG,3 ,812 0.1m 30m M3 1.25-3 6.5mm () M3 0.61Nm 2 3 2 2 3 () 2 2 () 2 4 3 / 3 3 1 INOUT 3 2 ON () INOUT 5 ONOFF 0.15MPa NO IN 3 1 3 / 3 3 OFF OFF

Stability of suction position,

2 !2 !3 !4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

Stainless Steel Heat

Note 2) Refer to page 7 for further information of options.

IDUS/IDFS

Operation time: 2 sec./min.

Vacuum Module: Ejector System Series ZX

VJ10-20-4A-6 2 pcs. 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Symbol: 10R6 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 10R6 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 10R6 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KZ (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R6 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant