F

1/2 KQL13-37S 22.23 21.7 17 28 37.5 40 22 9.6 62 P R O D U C T S E L E C T O R H E X A G O N S O C K E T H E A D M A L E C O N N E C T O R : K Q S ( K Q 2 S ) Applicable Thread Model H D L A M Effective Weight Tube OD R(PT) (Hex) 0rifice (mm2) (g) (mm) Nylon Urethane 4 M5x0.8 KQS04-M5 2 9.8 23 19.5 16 2.7 2.7 6.3 4 1/8 KQS04-01S 3 9.8 23 19 16 4.1 3.6 7.8 6 M5x0.8 KQS06-M5 2 11.8 24 20.5

VZS

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

AC Servo Motor Driver (Network card type ）

No. 1 No. 3 No. 1 Servo motor speed 100.00 r/min 100.00 r/min 150.00 r/min 4 4 4 5 3 3 3 5 5 2 2 6 Positioning 2 6 6 7 7 7 1 1 1 0 0 0 5. A delay time can be set with [Pr. PT39]. 6.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max. ON-flow 0.01 /2B, 6 11/2B, 21 0 0 0.2 0.4 0.6 0.8 1.0 Pressure (MPa) 1 2 3 4 5 Flow speed (m/s) Precautions Be sure to read before handling.

Large Flow Air Filter AF800/900 Series

Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

AF800/900

Flow rate (/min (ANR)) 1 4 1 6 8 Rc 1 4 NPT 1 4 G 14-3-13 2 Series AF800/900 Construction Component Parts Material AF800 AF900 No. Description Note Platinum silver painted q Aluminum die-casted Aluminum die-casted Body Platinum silver painted y Aluminum die-casted Aluminum die-casted Housing Replacement Parts Part no. AF800 AF900 11345-5B No.

Manifold Specifications

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

CG5-S

2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

AF800/900

(Ex.) 12740 Note 2) When specifying more than one alphabet symbol, indicate them alphabetically and put "-" between them. (Ex.) DR Note 3) Symbols "2", "6" and "8" can not be specified at the same time. (Ex.) 68 Note 4) Symbols "9", "D", and "J" can not be specified at the same time. (Ex.) 9 specified at the same time. (Ex.) 9DJ 2 2 Flow rate (l/min(ANR)) The bowl of series AL is used.

LEC-OM02904

LECSS63 6. 1. 2. 3. 4. 5. 17 CPU 19 3 ROM (Flash-ROM) 1A 8 5 8 (2) 20 2 1. CN2 47 () 2. 3. 1. 2. 8 4. 5. 1. 2. 3. 4. 5. 21 3 () 8 6 8 (2) 24 (UV W) 1. (TE1) 2. 3. (UVW) 4. (UVW) 5. 1. 2. (UVW) 6. 1. 2. 25 1. 23 2. 3. 4. 5. 6. 23 8 7 8 (2) 30 1. No.PA02 1 2. 1. 2.

OMU0023

(ii) Function codes to be used 03h / 10h (iii) Memory map Address Number of registers(Bytes) Details D0600 2 Alarm number of alarm entry 1 D0601 2 Alarm number of alarm entry 2 D0602 2 Alarm number of alarm entry 3 D0603 2 Alarm number of alarm entry 4 D0604 2 Alarm number of alarm history 5 D0605 2 Alarm number of alarm history 6 D0606 2 Alarm number of alarm history 7 D0607 2 Alarm number

OMS0020

Safety Instructions . 4 2 Summary . 6 2.1 Purpose of the Operation Manual . 6 2.2 Notation . 6 2.3 Abbreviations . 6 3. Scope . 7 3.1 Scope . 7 4. Hardware Specifications . 9 4.1 Input Specifications . 9 4.2 Communication Connector Pin Assignment . 9 4.3 Communication Circuit . 9 4.4 Wiring Example . 10 5.

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)