F

6 65 40 22 4 8 10 18 29.5 19.5 27 10.6 12 16 18.5 6 KM11-04-08-10 10 86 61.5 30 KM11-06-10-6 6 76 47 32 6 10 10 19.5 31.5 21.5 31 13 13.5 17 21 7.5 KM11-06-10-10 10 102 73 44 KM11-08-12-6 6 85 55 44 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 KM11-08-12-10 10 116 86 62 L5 FB N L1 L2 L3 L4 L6 P Q1 Q2 MA MB FA B Port Min Weight Model Inside Dia (g) (Inch Size) 19.5 6 10.6 5/16 65 10 18

VZS

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.

AC Servo Motor Driver (Network card type ）

4 6.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

U side end plate assembly r y w q t e u The drawing shows a plug-in type.

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max. ON-flow 0.01 /2B, 6 11/2B, 21 0 0 0.2 0.4 0.6 0.8 1.0 Pressure (MPa) 1 2 3 4 5 Flow speed (m/s) Precautions Be sure to read before handling.

Large Flow Air Filter AF800/900 Series

Flow rate (L/min (ANR)) 1 4 1 6 8 Rc 1 4 1 4 NPT 1 4 G 661 A AF800/900 Series Construction IN OUT Replacement Parts Part no. Qty. AF800 AF900 11345-5B 11345-5S q r No. Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

AF800/900

Flow rate (/min (ANR)) 1 4 1 6 8 Rc 1 4 NPT 1 4 G 14-3-13 2 Series AF800/900 Construction Component Parts Material AF800 AF900 No. Description Note Platinum silver painted q Aluminum die-casted Aluminum die-casted Body Platinum silver painted y Aluminum die-casted Aluminum die-casted Housing Replacement Parts Part no. AF800 AF900 11345-5B No.

Manifold Specifications

0 Tie-rod y, O-ring e, r, Seal A q Plug-in type With D-sub connector: Type 51F VVZS3000-1A-3-Port size (1) (-1) (2) Note 1) Bore -01: Rc 1/8, -C6: Embedded type One-touch fitting for 6, -C8: Embedded type One-touch fitting for 8. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly.

CG5-S

3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

AF800/900

Description Note Aluminum die cast Aluminum die cast Aluminum cast Aluminum cast Platinum silver paint Platinum silver paint q Body Housing y Replacement Parts Part No. AF800 AF900 11345-5B AF11-4 JIS B2401 G130 No.

LEC-OM02904

YF-1E-4 YNE-38 DH-122DH-112 d FVD22-6 DH-123DH-113 (1)e 38-6 YPT-60-21 TD-124TD-112 YF-1E-4 YET-60-1 (1)f R60-8 YPT-60-21 TD-125TD-113 YF-1E-4 YET-60-1 g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-121DH-111 m FVD14-8 DH-122DH-112 YF-1E-4 YNE-38 n FVD22-8 DH-123DH-113 (1)p R38-8 YPT-60-21 TD-124TD-112 YF-1E-4 YET-60-1 q FVD2-6 YNT-1614 1. 2. 11 22 11 (2) 11.4

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

OMS0020

Command "RE"Details . 28 5.5 Error Code . 30 6.

In-line Air Filter

) 11.2 Applicable tubing O.D. (3.2, 4, 1/8", 5/32") IN 18.2 8.5 33 2 x Mounting hole for M3 countersunk head screw 10 60.5 11.5 17.5 25 18 ZFC5 (4, 6, 5/32", 1/4") 19 Applicable tubing O.D. (4, 6, 5/32", 1/4") IN 33.4 20 30 18 53.9 23 4.5 6.4 15.7 13.6 24.6 6 ZFC Series Dimensions ZFC7 (6, 8, 1/4", 5/16") 23.6 Applicable tubing O.D. (6, 8, 1/4", 5/16") IN 39.8 24 34 20 68.3 27.3 4.5 8.7 19.3

Symbol: 09R3 (N.C., Port 1 IN, Port 2 OUT), Function: Y1 (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm)

Symbol: N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Lead Wire Length: 600mm, CE Compliant: -

Table of Contents

(Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Gasket Body Low tightening torque Tight seal Stainless steel 316 Specifications Applicable tubing material FEP (3) Nylon Soft nylon (1) Polyurethane Super PFA (2) Modified PTFE (4) 3.18/2 4/2.5 6/4 4/2.5 6/4 3.18/2.18 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 6/4 Applicable tubing O.D.