VFR

MPa Pressure (2) switch IS1000P-2-1 0.1 to 0.6 MPa Plug-in type MP2-2 MP3-2 AXT625-18A For filter regulator For pressure switch For air release valve 0.08 MPa 1a LED (RED) Blanking plate Filter element Max. switch capacity Max. operating current Inside voltage drop Air release valve (Single only) Operating pressure range 2 VA AC, 2 W DC 24 VAC, DC or less: 50 mA 100 VAC, DC: 20 mA 111511-5B

VFS

manual drain) Filtration degree Regulator U side Air release (2) valve spacer 5 m VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Set pressure (Outlet pressure) Pressure switch(1) 0.05 to 0.85 MPa Pressure(3) switch VZS MP2-3 MP3-2 VVFS3000-24A-10 INA-13-854-12-5B

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

mounting) VVFS2000-24A-2R (D side mounting) VVFS2000-24A-2L (U side mounting) (1) 5 m Air release valve spacer VP4 0.05 to 0.85 MPa S0700 (2) Pressure switch 0.1 to 0.6 MPa VQ IS1000P-2-1 Plug-in type 0.08 MPa 1a LED (RED) MP2-2 MP3-2 AXT625-18A For filter regulator For pressure switch For air release valve VQ4 Blanking plate VQ5 2 VA AC, 2 W DC Filter element 111511-5B

Table of Contents

AF800 AF900 11345-5B No. Description Material w e Bronze Element 11352-5B Bowl assembly AF11-4 AF11-4 JIS B2401 G130 r O-ring NBR 630332 t NBR 113136 113136 O-ring 11217 112310 NBR u Gasket for element Bowl (polycarbonate), drain cock, bowl guard and clamp ring are assembled. Assembly part no. for bowl (polycarbonate) and drain cock is 11316A (for AF800/900).

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1R (D side mounting) VVFS3000-24A-2R (D side mounting) IS1000P-2-1 Filter regulator Pressure switch Release valve Air filter (With auto-drain/With manual drain) Filtration degree Regulator SYJ Air release valve spacer Plug-in type 5 m (2) SZ Set pressure (Outlet pressure) Pressure switch(1) 0.05 to 0.85 MPa Pressure switch (3) MP2-3 MP3-2 VVFS3000-24A-10 INA-13-854-12-5B

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B

LEC-OM07605CN

250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B

Filter Regulator IW Series

Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)

Stability of suction position,

Description Material (Surface treatment) Note XT661 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR Pad form: Flat type with groove, Bellows type with groove 2 Plate Aluminum alloy (Clear anodized) 3 O-ring FKM 4 Shaft Stainless steel 5a Shaft ring A Stainless steel 5b Shaft ring B Stainless steel

AC Servo Motor Driver (Pulse input type/Positioning type ）

depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M5 For soft nylon tube Body rotates at 360 around the stud axis M5 female x M5 male MS-5AU-3 MS-5UL KQ2 For polyurethane tube 3.18/2 x M5 P.338 KQB2 Universal tee M5 female x M5 female x M5 male Body rotates at 360 around the stud axis 4/2.5 x M5 MS-5UT MS-5AU-4 KS KX For soft nylon and polyurethane tube P.338 KM Push For reducing Rc 1/8 female to M5 female R 1/8 x M5 female 6/4 x M5 MS-5B

AF800/900

AF800 AF900 11345-5B AF11-4 JIS B2401 G130 No. Description Material 11352-5B AF11-4 Bronze Element Bowl ass'y w e NBR 630332 r O ring NBR 113136 113136 O ring t Bowl (polycarbonate), drain cock, bowl guard and clamp ring are assembled. Assembly of bowl (polycarbonate) and drain cock is 11316A (for AF800/900).

Proposals for Energy Saving

AW1000 AF1000 111344 AW2000 AF2000 1129116 AW3000 AF3000 111585 AW4000 AF4000 Filter model Element part no. 1116103 630611 AW4000-06 AFM2000 AWM2000 AF4000-06 Filter model Element part no. 1116103 11345-5B 630617 AF800 AFM3000 AWM3000 AF5000 111724 11352-5B 630623 AF900 AFM4000 AWM4000 AF6000 111825 Micro mist separator Series AFD Mist separator Series AM Micro mist separator regulator

KJ

Weight: 12 g H Plug: M-5P Bushing: M-5B D Width across flats 10 M5 x 0.8 Width across flats 7 MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 T VMG Weight: 1.3 g Weight: 5.8 g Gasket: M-5G1 Gasket: M-5GH Weight: 0.04 g Weight: 0.01 g Precautions Refer

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Weight: 12 g KM KF Bushing: M-5B Plug: M-5P M M Width across flats 10 M5 x 0.8 Width across flats 7 H/DL L/LL M5 x 0.8 10.1 KC R 1 8 Weight: 5.8 g Weight: 1.3 g KK Precautions KK130 DM Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions.

KR

MS-5UL 3.18, 2.18 x M5 For soft nylon tube M5 female x M5 male Body rotates at 360 around the stud axis MS-5AU-3 For polyurethane tube 3.18, 2 x M5 P . 27 Universal tee MS-5UT M5 female x M5 female x M5 male P . 27 Body rotates at 360 around the stud axis 4, 2.5 x M5 MS-5AU-4 For soft nylon and polyurethane tube Push For reducing Rc 1/8 female to M5 female R x M5 female 1 8 6, 4 x M5 MS-5B

AF800/900

AF800 AF900 11345-5B No. Description Material w e Bronze Element 11352-5B Bowl assembly AF11-4 AF11-4 JIS B2401 G130 r O-ring NBR 630332 t NBR 113136 113136 O-ring 11217 112310 NBR u Gasket for element Bowl (polycarbonate), drain cock, bowl guard and clamp ring are assembled. Assembly part no. for bowl (polycarbonate) and drain cock is 11316A (for AF800/900).

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.