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Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

@q]0-c Suction tlltel Polyethylene NZM-SF @ Tension bolt Stainless steel o Silencer ass'y NZM-SA-0 o Check valve NBR ZM-CV o Release tlow rate conttol screw Stainless steel P318 t2-05A o Valve*' NVJ114-@86@ o Poppet valve ass'y ZM-PV-O o Vacuum switch zsEl-osl@@ zsEl-00.55@ zsMl-015, ZSM1-021 PluE connectol ass'v'.' zs-20-5A, zs-20-5A-30 (10) 'Reas spGcity an apprcpdat body code: " N.O. typ6

@q]0-c Suction tlltel Polyethylene NZM-SF @ Tension bolt Stainless steel o Silencer ass'y NZM-SA-0 o Check valve NBR ZM-CV o Release tlow rate conttol screw Stainless steel P318 t2-05A o Valve*' NVJ114-@86@ o Poppet valve ass'y ZM-PV-O o Vacuum switch zsEl-osl@@ zsEl-00.55@ zsMl-015, ZSM1-021 PluE connectol ass'v'.' zs-20-5A, zs-20-5A-30 (10) 'Reas spGcity an apprcpdat body code: " N.O. typ6

1 e r w e u r u t t y q y q Component Parts Description Material No.

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

ZM131H-K5LZ (-Q) ZM051H-K5LZ-E15 (-Q) ZM131H-K5LZ-E15 (-Q) ZM071H-K5LZ (-Q) ZM131M-K5LZ (-Q) ZM071H-K5LZ-E15 (-Q) ZM131M-K5LZ-E15 (-Q) ZM101H-K5LZ (-Q) ZM101H-K5LZ-E15 (-Q) 987 Series ZM Model Nozzle dia.

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* O . b 3 z o 1 0 0 6 o u o q ; N q * E 9 . " o . 5 " > 2 4 ' ;l l.:, . . o o o 2 4 6 8 1 0 1 2 1 4 1 6 1 8 2 0 TOTAL ENERGY ( nrbtc) (Tho!ends) Note: Minimum impact velocity tor PM nlodels it 4 itr/*c. 9k**k &"bs*rbers Non-Adjustable Hydraulic Series 49rc.

(For DC) For ZSE2 For ZSP1 Lead wire length ZY 5A 10 ZS Nil 0.3 m (Standard) How to order If ordering vacuum module with 600 mm or the longer lead wire, specify both vacuum module and connector assembly part numbers. Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc.

0 y t r q e u w !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA)/3(EB) 1(P) o Description No. Material Note Component Parts SJ3A60K with back pressure check valve Spool valve assembly 1 N.C. (Normally closed) Resin/H-NBR !0 y t r q e u q !2 i !1 Spool valve assembly 2 Resin/H-NBR N.O.

Motion controller Q series Programming Manual (COMMON) (Q173D(S)CPU/Q172D(S)CPU) (IB-0300134) "4.11.1 Connect/disconnect function of SSCNET communication" MELSEC-Q QD77MS Simple Motion Module User's Manual (IB-0300185) "14.12 Connect/disconnect function of SSCNET communication" MELSEC-L LD77MH Simple Motion Module User's Manual (IB-0300172) "14.13 Connect/disconnect function of SSCNET communication

PA01] ) [AL. 3E.1 ](J4/J3 ) 8.7 J3 J3MR-J3 (1)2 (_ _)3 (_ _._)(_ _)(._)(_ _) (2) ON/OFF /( ) Q (Q173D(S)CPU/Q172D(S)CPU) (IB-0300126) 4.11.1 SSCNET / MELSEC-Q QD77MS (IB-0300184) 14.12 SSCNET / MELSEC-L LD77MH (IB-0300162) 14.13 SSCNET / (3)J3 28 8.8 J3 PLC 8.8.1 J3 (1) .1J3 10s .1.2 .2 LEDAb.1b012 Ab. .1 () Q17_DSCPU Q17_DCPU Q17_HCPU Q170MCPU QD77MS_ QD75MH_ QD74MH

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Water and Air Safety

e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17