0.4

R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2)

7.5

, 3 position and 4 position dual 3 port valves.

0.4

(R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01

Vacuum System Peripherals:

17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve Series VT VT325/307/317 to 1 8 3 8 Vol. 4 0.63 to 5.5 3 port solenoid valve Series VP VP300/500/700 to Vol. 4 1 8 1 2 2.9 to 15 3 port solenoid valve Series VS to Vol. 4 1 8 3 4 3.8 to 20 3 position valve Series

HRX-OM-X010

Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 HRZ Series TOC-1 HRX-OM-X010 Table of Contents 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation location and maintenance work area . 3-5 3.3 Procedure for Installation . 3-6 3.3.1 Installation . 3-6 3.3.2 Procedure for system securing

IDX-OM-W022

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

IDX-OM-W023

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Stability of suction position,

3 !4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

Stainless Steel Heat

Note 3) Install a circuit breaker with sensitivity of 30mA.

IDUS/IDFS

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

Vacuum Module: Ejector System Series ZX

ZS-10-5A-50 1 pc. 6 1A 36 VJ10 ZP 2 m (For 110 VAC) 2.5 m Lead wire length 6 Nil 3A 36 VJ10 SP 3 m 0.6 m 30 50 3 m 5 m ZCUK The asterisk () denotes the symbol for assembly. AMJ AMV Ejector System/Recommended Model (The models below will have shorter deliveries.)

CATALOG

8 5/8 3/8 1/8 3/8 7/16 1.1 2 3/16 1 1/4 3/8 9/16 3/8 5 5/8 7/16-20 3/4 5/16-24 2 1/2 1.71 3 5/8 2.6 0.3 1 1/8 6 3/16 1.26 1 2.4 6 200 (2) 1 1 7/16 1 1/8 5/8 3/8 1/8 3/8 9/16 1.06 2 11/16 1 3/4 3/8 9/16 3/8 5 5/8 7/16-20 3/4 5/16-24 3 1.75 3 3/4 3.1 0 1 1/8 6 5/16 1.3 1 2.48 6 1/8 250 (2.5) 1 1 5/8 1 1/8 5/8 3/8 1/8 3/8 9/16 1.06 3 1/8 2 1/4 3/8 9/16 3/8 5 3/4 3/8-24 3 3/4 2.34 4 1/4 3.9 0

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(A) 4 2(B) (A)4 (EA)5 1 (P) 3(EB) 3(EB) 1(P) 5(EA) 3 position closed center / exhaust center / pressure center Symbol 3 position closed center (B) 2 (A) 4 2(B) (A)4 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 (EA)5 1 (P) 3(EB) 3(EB) 1(P) 5(EA) (This figure shows a closed center type.)

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number. (Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

EX120/121/122

ZS-28-CA-2 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-4 ZS-28-CA-4 ZS-28-CA-4 SMC part no. Manufacturer's part no.