Compressed Air Quality: General Dry Air, Treatment Air Flow Rate(l/min): 500, Connection Type: [One-Touch Plumbing] One-Touch Pipe, Plumbing Thread Nominal: -, Connecting Tube Diameter: Ø12, Filtration Level: 0.01μm, Operating Environment: Clean Room Specifications (Prevent dust), Operating Pressure Range(MPa): null～0.7, Drain Cock: No, Bowl Material: [Resin] Nylon Case, Bowl Guard: No, Specification

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 to 20 stations per 1 station: 18 SY 2 stations: 86 C4(4) C6(6) M5(M5 thread) VQZ2l20 VQZ2l21 addition Rc(PT) 1/8 Top VQZ2000 2 to 20 stations SYJ VV5QZ22lll per 1 station: 26 SX 2 stations: 181 C6(6) C8(8) C10(10) Rc(PT)1/4 VQZ3l20 VQZ3l21 addition Rc(PT) 1/4 Top VQZ3000 2 to 20 stations VK VV5QZ32lll per 1 station: 53 VZ VF VFR VP7 How to Order Manifold Assembly (Example) VP4 VQ VQZ21205MC6

VS7-6

Port size P, A, B R1, R2 Piping Model Side Side Bottom Bottom 1 4 3 8 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 3 8 1 4 3 8 3 8 1.19-8 Series VS7-6 Manifold Manifold: Series VV71 Standard Specifications SV ISO size q Series ISO size q 1 to 10 Manifold block size Applicable solenoid valve Number of stations SY 1 4 3 8 One-touch fitting: 12 1 4 3 8 A, B-port P, R1, R2-port One-touch fitting:

Manifold Specifications

P), 3/5(R) port Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 VZ One-touch fitting for 4 C4 Port size 4(A), 2(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 VV5Z3-40 VV5Z3

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

137 150.5 137 PE port PE port PE port PE port 65 39 EA EB P 27 65 39 EA EB 27 P 1/2, 3/4, 1 1 port 3/4-2 port 3, 5 port 5 45 35 5 1/2, 3/4, 1 1 port 3/4-2 port 3, 5 port 45 35 3-11-10 11 Conforming to ISO Standard Solenoid Valve (with M Connector) Series EVS1-01/1-02 (Size 1) (Size 2) VK VZ VF VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

VZ3000

VZ VZ 3 5 0 X20 ( ) VF VFR Entry is the same as standard products.

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

VZ5000

-3-70 5 Port Solenoid Valve Base Mounted Series VZ5000 2 Position Single VZ5140 Grommet (G), (H) VZ5140-01 02 G H VK Manual override (Non-locking) (Mounting hole) VZ VF VFR VP4 (Lead wire length) VZS G: 300 mm H: 600 mm 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFS VS4 2-Rc 1/4 (5(R1), 3(R2) port) VQ7 EVS (PE port) VFN L plug connector (L) VZ5140-LM plug connector (M) VZ5140-M(Lead wire length

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

VP4

Local Area: (800) 258-9200-www.stevenengineering.com G 1/2 5-1 1/4, 1 1/2 Conduit terminal:VP4270T12 14 DIN terminal: VK4270D12 14 G 1/2 Applicable cable O.D. 6 to 12 G 1/2 3-6-8 9 Series VP450 Manifold Specifications How to Order VVP4 1 04 04 0 5 VK Thread type Series VP 5 port solenoid valve Manifold Nil Rc VZ G F N NPT Base size NPTF T VF Common EXH 5 6 3 4 A/B Port size 1 VFR Symbol

Manifold Specifications

Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-1A Type 21 How to Order VF VV5Z5 05 21 1 4(A), 2(B) port VFR Stations P, R port thread type VP4 02 2 stations 1(P) port NPT G Nil Rc Rc 1/4 20 VZS 20 stations 00F 00N 3/5(R) port NPTF 00T VFS Rc 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both

VZ1000

8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted, single operating VZS How to Order Manifold VFS Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the

VK3000

direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

SYJ SX VK VZ Blank Plate Assembly/Base Mounted VVQD1000-10A-5 VF VFR VP7 VP4 Blank plate assembly includes 2 screws and 1 gasket.

Manifold Specifications

Series VZ1000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

Manifold Specifications

Non plug-in type: VVZS3000-P-2 SUP block disk : AXT625-12A EXH blocking plate 01 02 01 02 VK VZ Block plate Individual SUP spacer VF VFR VP4 VZS Double check spacer Plug-in type: VVZS3000-22A-1 Non-plug-in type: VVZS3000-22A-2 VFS RC 1/8, 1/4 VS4 SUP port VQ7 Individual EXH spacer Plug-in type: VVZS3000-R-02-1 Non plug-in type: VVZS3000-R-02-2 EVS VFN Double check spacer Individual EXH spacer

Manifold Specifications

Non plug-in type: VVZS2000-22A-2 Individual SUP spacer Plug-in type: VVZS2000-P-01-1 Non plug-in type: VVZS-2000-P-01-2 VK VZ Individual SUP spacer Double check spacer VF VFR VP4 VZS VFS VS4 SUP port VQ7 Individual EXH spacer Plug-in type: VVZS2000-R-01-1 Non plug-in type: VVZS2000-R-01-2 EVS VFN Throttle valve spacer Plug-in type: VVZS2000-20A-1 Non plug-in type: VVZS2000-20A-2 Individual

VQ4000

SY SYJ 0 VQ4 0 1 Plug-in SX 2 5 VQ4 1 Plug lead VK VZ Enclosure Configuration Dust-proof 2 position single 3 position closed center VF (A) 4 (B) 2 (A) 4 (B) 2 Dust tight, jet proof (Applicable to IP 65) W 3 1 VFR 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 VP7 Metal Rubber B: Locking slotted style : Non-locking