Table Accuracy: Basic, Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC

Table Accuracy: H (High Precision), Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable

Table Accuracy: Basic Type, Max. Rotating Torque: Basic, 6.6 N.m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 5m, Controller: Ether Net/IP™, Mounting: DIN Rail, I/O Cable: -

Table Accuracy: Basic Type, Max. Rotating Torque: High Torque, 10 N▪m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 5m, Controller: Ether Net/IP™, Mounting: DIN Rail, I/O Cable: -

Table Accuracy: High-precision Type, Max. Rotating Torque: High Torque, 10 N▪m, Rotation Angle: 320°, Motor Cable Entry: Basic, Entry Right Side, Actuator Cable Type, Length: 5m, Controller: Ether Net/IP™, Mounting: DIN Rail, I/O Cable: -

Table Accuracy: High Precision, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller

Table Accuracy: High Precision, Size: 50, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.32, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator cable length(

Oscillation Angle A: 320°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Robotic (flexible) cable, Actuator

Table of Contents

Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.

Digital Flow Switches, Series PF2A, Series PF2W

0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.