This is a legacy product, and replaced byC96SDB63-200C, CYL, TIE ROD, ISO, AUTO-S *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, PE, 63MM C95/CP95 DBL-ACT AUTO-SW, 7.05479 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)C95ISO cylinderC95SDouble acting, Single rod--666

This is a legacy product, and replaced byCP96SDB100-200C, CYL, PROFILE, ISO, VDMA *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, SE, 100MM C95/CP95 DBL-ACT AUTO-SW, 12.12542 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666

This is a legacy product, and replaced byCP96SDB50-200C

This is a legacy product, and replaced byCP96SDB63-200C

This is a legacy product, and replaced byCP96SDB80-200C

This is a legacy product, and replaced byC96NDB80-200C, 80MM ACNL OTHERS (COMBO), ACTUATOR, ACNL TIE-ROD CYLINDER, RC, 80MM ACNL OTHERS (COMBO), 10.80265 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 5.24210 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-S *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 6.13619 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)C95ISO cylinderC95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96SDB40-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, ME, 40MM C95/CP95 DBL-ACT AUTO-SW, 3.44472 lb

This is a legacy product, and replaced byCP96SDB32-200C

This is a legacy product, and replaced byCD75EB32-200C-B

High Vacuum Angle Valve, XL Series

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

This is a legacy product, and replaced byCP96SDB50-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 6.06961 lb

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

Metal Seal/Rubber Seal Series VQ Body Ported

No. of output points, 16 points Master station: PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points.

Base Mounted Metal Seal/Rubber Seal Series VQ

U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 16 2 to 24 2 to 16 2 to 24 stations

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Series VQ Base Mounted Metal Seal/Rubber Seal

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied. T unit Can be connected with PLC I/O card for serial transmission. EX300-TMB1For models of Mitsubishi Electric Corp. EX300-TTA1For models of OMRON Corp. EX300-TFU1For models of Fuji Electric Company Ltd.

LJ1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Table of Contents

No. of output points, 16 points Master station: PLC made by Mitsubishi Electric Corporation Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). No. of output points, 16 points. No. of sta. occupied, 2 stations Stations are counted from station 1 on the D side.