Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECP1, PNP, Programless Type, I/O Cable Length for LEC: 5m, Controller

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Standard Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: LECA6, PNP, Step Data Input Type, I/O Cable Length for LEC: 5m, Controller

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 500mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Without Cable, Actuator Cable Length: Without Cable, Controller Type - LEC, JXC: LECPA, PNP, Pulse Input Type, I/O Cable Length for LEC: -, Controller

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 500mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): 6N (LECA6, Step Data Input Type, NPN), I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: Screw Mounting

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 12; LEY32, 16, Stroke: 500mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): LECA6, Step Data Input Type, NPN, I/O Cable Length for LEC: 1.5m, Controller Mounting: Screw Mounting, Communication

NCQ2/CQ2

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 Warranty and Operating Instructions Bore size 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) +

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

Metal Seal/Rubber Seal Series VQ Body Ported

S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Base Mounted Metal Seal/Rubber Seal Series VQ

S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 16 2 to 24 2 to 16 2 to 24

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5